PUMP, CHEMICAL SUPPLY UNIT, AND SUBSTRATE TREATMENT APPARATUS

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001]This application claims benefit of priority to Korean Patent Application No. 10-2024-0096501 filed on Jul. 22, 2024, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety.

BACKGROUND

1. Field

[0002]The present disclosure relates to a pump, chemical supply unit, and substrate treatment apparatus.

2. Description of Related Art

[0003]A pump may be used to supply chemicals, such as a thinner, within a substrate treatment apparatus. In a substrate treatment apparatus, reducing particles, which are the same as photoresist (PR), is an urgent task, but on the other hand, since a pump having a large supply volume of chemicals is required, a bellows pump, or the like, is used as a pump to supply chemicals.

[0004]However, a bellows pump has limitations such as low discharge of mixed bubbles and a high risk of particle generation. Additionally, a chemical replacement effect inside the bellows pump is low.

[0005]In order to solve these problems, a diaphragm pump and a TubePhragm pump have been designed, but both thereof have small supply volumes (pump capacity), which may make it difficult to apply such pumps to a substrate treatment apparatus.

[0006]In order to increase the supply volume using the existing TubePhragm, a tube size of the TubePhragm may be increased, but in this case, since a pressure value needs to be increased, the risk of plastic deformation of the tube increases.

[0007]Additionally, there is a method of connecting a plurality of TubePhragms in parallel, but in this case, since the costs or an installation space increases, individual differences may occur according to the pump flow characteristics.

PRIOR ART REFERENCE

Patent Document

SUMMARY

[0009]The present disclosure has been created to solve the above-described problems and provides a pump, chemical supply unit, and substrate treatment apparatus.

[0010]In order to achieve the above-described objective, according to an embodiment of the present disclosure, a pump of the present disclosure includes: a case having a pressure space formed therein; a pressurizing member connected to the pressure space by a pressurizing line; and a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.

[0011]The case may include: a case body in which the pressure space is formed to penetrate from one side thereof to the other side thereof; a first manifold installed on one side of the case body and having a chemical suction hole; and a second manifold installed on the other side of the case body and having a chemical discharge hole, and the first manifold may have a first internal space communicating with the plurality of tubes and the chemical suction hole, and the second manifold may have a second internal space communicating with the plurality of tubes and the chemical discharge hole.

[0012]The first manifold may include: a first fixing portion covering one side of the case body and having a plurality of first fixing holes into which one ends of the plurality of tubes are inserted and fixed; a first ring portion formed in a ring shape to form the first internal space; and a first cover formed to allow the chemical suction hole to penetrate therethrough, and the first fixing portion, the first ring portion, and the first cover may be assembled in a state in which the first ring portion is disposed between the first fixing portion and the first cover.

[0013]A bubble removal hole may be formed in the first cover so that the bubble removal hole penetrates through the first cover, and the bubble removal hole may be formed to communicate with the first internal space.

[0014]The second manifold may include: a second fixing portion covering the other side of the case body and having a plurality of second fixing holes into which the other ends of the plurality of tubes are inserted and fixed; a second ring portion formed in a ring shape to form the second internal space; and a second cover formed to allow the chemical discharge hole to penetrate therethrough, and the second fixing portion, the second ring portion, and the second cover may be assembled in a state in which the second ring portion is disposed between the second fixing portion and the second cover.

[0015]A pressurizing hole communicating with the pressure space may be formed in the case body, and the pressurizing line may be connected to the pressurizing hole and an exhaust hole communicating with the pressure space may be formed in the case body.

[0016]The pressurizing member may be configured to supply pressurized gas as the pressure-generating fluid.

[0017]The pump may further include a plurality of shrinkage detection sensors installed in the case and detecting a shrinkage amount of the plurality of tubes.

[0018]According to another aspect of the present disclosure, provided is a chemical supply unit including: a storage tank in which a chemical is stored; a supply pipe extending from the storage tank to a nozzle unit; a pump installed in the supply pipe and supplying the chemical to the nozzle unit through a plurality of tubes, the pump including: a case having a pressure space formed therein; a pressurizing member connected to the pressure space through a pressurizing line; and a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.

[0019]According to yet another aspect of the present disclosure, provided is a substrate treatment apparatus including: a process chamber; a treatment container installed in the process chamber and having a processing space for processing a substrate; a support unit supporting the substrate in the processing space; a nozzle unit discharging a chemical to the substrate supported by the support unit; a chemical supply unit supplying the chemical to the nozzle unit, where the chemical supply unit may include: a storage tank in which the chemical is stored; a supply pipe extending from the storage tank to the nozzle unit; and a pump installed in the supply pipe and supplying the chemical to the nozzle unit through a plurality of tubes, and the pump may include: a case having a pressure space formed therein; a pressurizing member connected to the pressure space through a pressurizing line; and a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.

[0020]A pump according to an embodiment of the present disclosure may increase a supply amount (discharge amount) by including a plurality of tubes, and since there is no need to thicken a diameter of the tube, the pump may be used at low pressure and also reduce the risk of plastic deformation of the tube.

BRIEF DESCRIPTION OF DRAWINGS

[0021]The above and other aspects, features, and advantages of the present disclosure will be more clearly understood from the detailed following description, taken in conjunction with the accompanying drawings, in which:

[0022]FIG. 1 is a view illustrating a substrate treatment apparatus according to an embodiment of the present disclosure;

[0023]FIG. 2 is a perspective view illustrating a pump of a chemical supply unit in the substrate treatment apparatus of FIG. 1;

[0024]FIG. 3 is an exploded perspective view of the pump of FIG. 2;

[0025]FIG. 4 is a perspective view illustrating a state in which a case, a first fixing unit, and a second fixing portion are assembled in the pump of FIG. 3;

[0026]FIG. 5 is a view illustrating a longitudinal section of the pump of FIG. 4;

[0027]FIG. 6 is a view illustrating a partial cross-section of the pump of FIG. 4; and

[0028]FIG. 7 is a view illustrating an operation process for the pump of FIG. 2.

DETAILED DESCRIPTION

[0029]Hereinafter, preferred example embodiments will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art may easily implement the present disclosure. However, in describing preferred example embodiments of the present disclosure in detail, when it is determined that a detailed description of related known functions or configurations may unnecessarily obscure the gist of the present disclosure, the detailed description thereof will be omitted. Furthermore, the same reference numbers are used throughout the drawings to refer to the same or similar portions. Furthermore, in the present specification, it may be understood that the expressions such as “on,” “above,” “upper,” “below,” “beneath,” “lower,” and “side,” merely indicated based on drawings, and may actually vary depending on the direction in which the components are disposed.

[0030]Furthermore, throughout the specification, the terms “connected to” or “coupled to” are used to designate a connection or coupling of one element to another element and include both a case where an element is “directly connected or coupled to” another element and a case where an element is “indirectly connected or coupled to” another element via still another element. Furthermore, when a certain portion “includes” or “comprises” a certain component, this indicates that other components are not excluded and may be further included unless otherwise noted.

[0031]FIG. 1 is a view illustrating a substrate treatment apparatus according to an embodiment of the present disclosure.

[0032]Referring to FIG., a substrate treatment apparatus A according to an embodiment of the present disclosure includes a process chamber 10, a treatment container 20, a support unit 30, a nozzle unit 40, and a chemical supply unit 50.

[0033]The process chamber 10 may have an internal space having an appropriate size so that a substrate S may be introduced and a treating process may be performed. The process chamber 10 may have an opening 10a formed in a side wall thereof. The opening 10a may function as a passage through which the substrate S enters and exits the process chamber 10. A door may be installed in the opening 10a, and the door may be configured to open and close the opening 10a. When the process is advanced, the door blocks the opening 10a to seal an internal space of the process chamber 10.

[0034]Additionally, the treatment container 20 is disposed in the internal space of the process chamber 10 and is disposed to surround a circumference of the support unit 30. The treatment container 20 provides a processing space in which a treating process for the substrate S is implemented inside. In this case, the treatment container 20 may be formed in a cup shape in which an upper portion is open. A chemical discharge hole 20a for discharging a recovered liquid and a gas discharge hole 20b for discharging gas inside the treatment container 20 may be formed in a bottom of the treatment container 20 receiving and recovering a photosensitive liquid or a cleaning liquid from the substrate S. Additionally, the treatment container 20 may be configured to move up and down.

[0035]Additionally, the support unit 30 supports the substrate S in the processing space of the treatment container 20. The support unit 30 may include a spin chuck 31 supporting the substrate S and a rotary driving member 32 providing rotary force to rotate the spin chuck 31. The spin chuck 31 may have a circular plate shape. As an example, the spin chuck 31 may be provided with a plurality of chuck pins (not illustrated) gripping a side of the substrate S. The plurality of chuck pins may be disposed at regular intervals along the circumference of the substrate S, and the number and shape of chuck pins and a position in which the chuck pins are disposed may be variously changed. The rotary driving member 32 may be a motor in which rotation speed thereof is variable. The rotary driving member 32 may be provided with a lifting structure (not illustrated) such as a cylinder inside, and may be raised and lowered by the lifting structure.

[0036]Additionally, the nozzle unit 40 is configured to discharge a chemical to the substrate S supported by the support unit 30. The nozzle unit 40 may discharge a cleaning liquid such as a thinner, but the present disclosure is not limited thereto, and the nozzle unit 40 may discharge any chemical used in a substrate treating process.

[0037]Meanwhile, the chemical supply unit 50 is configured to supply the chemical to the nozzle unit 40. The chemical supply unit 50 may include a storage tank (not illustrated), a supply pipe 51, and a pump 1000.

[0038]The storage tank is a tank in which the chemical is stored, and the supply pipe 51 may be disposed to extend from the storage tank to the nozzle unit 40. In other words, the supply pipe 51 is a passage through which the chemical is supplied from the storage tank to the nozzle unit 40 by connecting the storage tank and the nozzle unit 40.

[0039]Additionally, the pump 1000 is installed in the supply pipe 51 and provides supply force to supply the liquid to the nozzle unit 40. The pumps 1000 are configured to supply to the nozzles through a plurality of tubes 200 to increase the supply capacity, and the specific structure thereof will be described below.

[0040]The substrate treatment apparatus A described above may be configured to treat two substrates S as illustrated in the drawings, and the present disclosure is not limited thereto, and the substrate treatment apparatus A may be configured to have a structure capable of treating one substrate S or a structure capable of treating two or more substrates S.

[0041]FIG. 2 is a perspective view illustrating a pump of a chemical supply unit in the substrate treatment apparatus of FIG. 1, and FIG. 3 is an exploded perspective view illustrating the pump of FIG. 2.

[0042]FIG. 4 is a perspective view illustrating a state in which a case, a first fixing portion, and a second fixing portion are assembled in the pump of FIG. 3, FIG. 5 is a view illustrating a longitudinal section of the pump of FIG. 4, and FIG. 6 is a view illustrating a partial cross-section of the pump of FIG. 4.

[0043]Referring to the drawings, the pump 1000 according to an embodiment of the present disclosure may include a case 100, a pressurizing member (not illustrated), and a plurality of tubes 200.

[0044]The case 100 may have a cylindrical structure that may withstand internal pressure properly in consideration of the chemical supply capacity of the pump 1000. The case 100 may have a pressure space 100a formed inside so that the pump 1000 may generate the chemical supply capacity.

[0045]Additionally, although not illustrated in the drawings, the pressurizing member is a member applying pressure to the pressure space 100a of the case 100, and may be connected to the pressure space 100a by a pressurizing line L4. That is, the pressurizing member may apply pressure to the pressure space 100a of the case 100 by supplying a pressure-generating fluid to the pressure space 100a through the pressurizing line L4.

[0046]Additionally, a plurality of tubes 200 may be disposed in the pressure space 100a of the case 100.

[0047]When the pressurizing member supplies the pressure-generating fluid to the pressure space 100a, the pressure inside the pressure space 100a increases, and the plurality of tubes 200 are contracted due to the pressure.

[0048]That is, the plurality of tubes 200 has an arrangement structure that the tubes 200 are spaced apart from an inner side of the pressure space 100a, and thus, when the pressure-generating fluid is supplied to the pressure space 100a, the plurality of tubes 200 are pressurized by the pressure-generating fluid and then contracted. When the plurality of tubes 200 are contracted, the chemical inside is discharged, and then, the chemical moves to the nozzle unit 40 (see FIG. 1).

[0049]In order to increase the supply amount using a conventional pump having one tube, there is only a method of increasing a size of the tube or connecting a plurality of pumps in parallel. However, since a pressure value for the tube should be increased when the size of the tube is increased, there is a problem that the risk of the tube being deformed plastically increases. Additionally, when the plurality of pumps are connected to each other in parallel and are used, there is a limitation that the risk of the tubes of some pumps being deformed plastically increases depending on the difference pump flow rate characteristics of each of the plurality of pumps, and the costs and an installation space increase.

[0050]Accordingly, in the present disclosure, as a method of increasing the capacity of the pump, a plurality of tubes 200 are configured to be pressurized simultaneously to one pump 1000. For this reason, the plurality of tubes 200 may be contracted even with low pressurizing force of the pressurizing member, and there is no need to consider the difference in the pump flow rate characteristics of each of the plurality of pumps, and the costs and the installation space do not increase.

[0051]Specifically, the case 100 may include a case body 110, a first manifold 120, and a second manifold 130.

[0052]The case body 110 may be formed so that a pressure space 100a penetrates from one side thereof to the other side thereof. As an example, as illustrated in the drawing, the pressure space 100a may be formed so as to penetrate from an upper side to a lower side of the case body 110. In this case, the pressure space 100a is a space surrounded by the case body 110, the first manifold 120, and the second manifold 130.

[0053]Here, the first manifold 120 may be installed on one side of the case body 110 and the second manifold 130 may be installed on the other side of the case body 110. As an example, as illustrated in the drawing, the first manifold 120 may be installed on the upper side of the case body 110 and the second manifold 130 may be installed on the lower side of the case body 110.

[0054]Additionally, the first manifold 120 has a chemical suction hole 123a, and the chemical suction hole 123a may be connected to a chemical suction line L1. The chemical may be sucked into the pump 1000 via the chemical suction hole 123a by passing through the chemical suction line L1. The chemical suction line L1 is a portion of the supply pipe 50, specifically, a portion between a storage tank (not illustrated) and the pump 1000 in the supply pipe 51 (see FIG. 1).

[0055]The second manifold 130 has a chemical discharge hole 133a, and the chemical discharge hole 133a may be connected to a chemical discharge line L3. The chemical may be discharged to the outside of the pump 1000 through the chemical discharge hole 133a and may be supplied to the nozzle unit 40 through the chemical discharge line L3. The chemical discharge line L3 is a portion of the supply pipe 50, specifically, a portion between the pump 1000 and the nozzle unit 40 in the supply pipe 50.

[0056]More specifically, the first manifold 120 may have a first internal space 120a communicating with the plurality of the tubes 200 and the chemical suction holes 123a. The first internal space 120a is a space in which the chemical suctioned through the chemical suction holes 123a stays before moving to the plurality of tubes 200. In other words, the chemical suctioned through the chemical suction hole 123a may move to the first internal space 120a, and then may move uniformly to each of the plurality of tubes 200.

[0057]The first manifold 120 may include a first fixing portion 121, a first ring portion 122, and a first cover 123.

[0058]The first fixing portion 121 has a structure covering one side of the case body 110. As an example, as illustrated in the drawing, the first fixing portion 121 has a size corresponding to an upper portion of the case body 110, and may be installed while covering the upper portion of the case body 110.

[0059]Additionally, the first fixing portion 121 may have a plurality of first fixing holes 121a. The plurality of first fixing holes 121a are portions into which one ends of the plurality of tubes 200 are inserted and fixed. As an example, as illustrated in the drawing, the upper end of the plurality of tubes 200 may be inserted and fixed into the plurality of first fixing holes 121a. For this reason, only the plurality of tubes 200 have a structure communicating with the plurality of first fixing holes 121a on an upper side thereof, and an open upper portion of the pressure space 100a of the case 100 is blocked by the first fixing portion 121.

[0060]The first fixing portion 121 is assembled with the first ring portion 122 and the first cover 123, and the first ring portion 122 may be assembled in a state in which the first ring portion 122 is disposed between the first fixing portion 121 and the first cover 123. That is, the first fixing portion 121, the first ring portion 122, and the first cover 123 may be assembled to each other to form a first manifold 120. As an example, as illustrated in the drawing, the first manifold 120 may be formed on the upper portion of the case body 110, and may have an assembly structure in which the first fixing portion 121, the first ring portion 122 and the first cover 123 are sequentially stacked.

[0061]Here, the first ring portion 122 may be formed in a ring shape to form the first internal space 120a. The first internal space 120a is formed inside the first manifold 120, and, in order to form the first internal space 120a, the first ring portion 122 may have a ring shape to form an internal side surface of the first internal space 120a. In this case, the first internal space 120a may communicate with the plurality of tubes 200 inserted and fixed into the plurality of first fixing holes 121a.

[0062]Additionally, the first cover 123 may be formed to allow the chemical suction hole 123a to penetrate therethrough. As an example, as illustrated in the drawing, the chemical suction hole 123a may be formed in the first cover 123 in a vertical direction. In this case, the chemical suction hole 123a communicates with the first internal space 120a, and may ultimately have a structure communicating with the plurality of tubes 200. Accordingly, the chemical sucked through the chemical suction hole 123a of the first cover 123 may be received by flowing into the plurality of tubes 200 by passing through the first internal space 120a of the first ring portion 122.

[0063]Additionally, a bubble discharge hole 123b may be formed in the first cover 123 so that the bubble discharge hole 123b penetrates through the first cover 123. As an example, as illustrated in the drawing, the bubble discharge hole 123b may be formed in the first cover 123 in the vertical direction. In this case, the bubble discharge hole 123b may have a structure communicating with the first internal space 120a. For this case, the bubbles included in an upper portion of the chemical of the plurality of tubes 200 may be removed by escaping to the outside through the bubble discharge hole 123b. That is, when removing bubbles included in the chemical before discharging the chemical, as the plurality of tubes 200 contract and a chemical level inside the plurality tubes 200 rises, the bubbles may be removed through the bubble discharge hole 123b on an upper side. In this case, as the bubble discharge hole 123b may be connected to a bubble discharge line L2, so that the bubbles discharged through the bubble discharge hole 123b may be discharged through the bubble discharge line L2.

[0064]Additionally, the second manifold 130 may have a second internal space 130a communicating the plurality of tubes 200 and the chemical discharge hole 133a. The second internal space 130a is a space in which the chemical included in the plurality of tubes 200 stays before being discharged through the chemical discharge hole 133a. That is, the chemical included in the plurality of tubes 200 may move to the second internal space 130a and then to the chemical discharge hole 133a.

[0065]The second manifold 130 may include a second fixing portion 131, a second ring portion 132, and a second cover 133.

[0066]The second fixing portion 131 has a structure covering the other side of the case body 110. As an example, as illustrated in the drawing, the second fixing portion 131 has a size corresponding to the lower side of the case body 110 and may be installed while covering the lower side of the case body 110.

[0067]Additionally, the second fixing portion 131 may have a plurality of second fixing holes 131a. The plurality of second fixing holes 131a are portions into which the other ends of the plurality of tubes 200 are inserted and fixed. As an example, as illustrated in the drawing, lower ends of the plurality of tubes 200 may be inserted and fixed into the plurality of second fixing holes 131a. For this reason, only the plurality of tubes 200 have a structure communicating with the plurality of second fixing holes 131a on a lower side thereof, and an open lower portion of the pressure space 100a of the case 100 is blocked by the second fixing portion 131.

[0068]The second fixing portion 131 is assembled with the second ring portion 132 and the second cover 133, and the second ring portion 132 may be assembled in a state in which the second ring portion 132 is disposed between the second fixing portion 131 and the second cover 133. In other words, the second fixing portion 131, the second ring portion 132 and the second cover 133 may be assembled with each other to form the second manifold 130. As an example, as illustrated in the drawing, the second manifold 130 may be formed on the lower side of the case body 110, and may have an assembly structure in which the second fixing portion 131, the second ring portion 132, and the second cover 133 are sequentially disposed on a lower side.

[0069]Here, the second ring portion 132 may be formed in a ring shape to form the second internal space 130a. The second internal space 130a is formed inside the second manifold 130, and, in order to form the second internal space 130a, the second ring portion 132 may have a ring shape to form an internal side surface of the second internal space 130a. In this case, the second internal space 130a may communicate with the plurality of tubes 200 inserted and fixed into a plurality of second fixing holes 131a.

[0070]Additionally, the second cover 133 may be formed so that the chemical discharge hole 133a penetrates therethrough. As an example, as illustrated in the drawing, the chemical discharge hole 133a may be formed in the second cover 133 in the vertical direction. In this case, the chemical discharge hole 133a may communicate with the second internal space 130a, and may ultimately have a structure communicating with the plurality of tubes 200. For this reason, the chemical included in the plurality of tubes 200 may be discharged through the chemical discharge hole 133a of the second cover 133 by passing through the second internal space 130a of the second ring portion 132.

[0071]Meanwhile, a pressurizing hole 110a communicating with the pressure space 100a is formed in the case body 110, and the pressurizing line L4 may be connected to the pressurizing hole 110a. As an example, as illustrated in the drawing, the pressurizing hole 110a may be formed on a side of the case body 110.

[0072]The pressurizing line L4 may be connected to the pressurizing member, and in this case, the pressurizing member may communicate with the pressure space 100a of the case body 110 through the pressurizing line L4 and the pressurizing hole 110a.

[0073]When the pressurizing member supplies the pressure-generating fluid to the pressure space 100a through the pressurizing line L4 and the pressurizing hole 110a, the pressure e in the pressure space 100a increases, and accordingly, the plurality of tubes 200 are contract, thereby discharging the chemical in the plurality of tubes 200.

[0074]Furthermore, even when removing bubbles included in the chemical before discharging the chemical, as the plurality of tubes 200 are contracted, a chemical level in the plurality of tubes 200 may be raised, thereby removing the bubbles through the bubble discharge hole 123b.

[0075]In the case body 110, an exhaust hole 110b connected to the pressure space 100a may be formed.

[0076]The exhaust hole 110b may be connected to an exhaust line L5, but the pressure inside the pressure space 100a may be lowered by exhausting gas inside the pressure space 100a through the exhaust line L5. Accordingly, the plurality of tubes 200 may be expanded, so that the chemical may be sucked into the plurality of tubes 200 through the chemical suction hole 123a.

[0077]In this case, the pressurizing member may be configured to supply pressurized gas as the pressure-generating fluid. The pressurized gas may be utilized as the pressure-generating fluid in this manner, thus reducing the size of the pump 1000. When pressurized oil is utilized as the pressure-generating fluid as in the conventional art, a cylinder should be configured to push the pressurized oil into the pressure space 100a. In this case, there is a limitation that the size of the pump 1000 increases due to the cylinder.

[0078]Additionally, the pump 1000 according to the present disclosure may further include a plurality of shrinkage detection sensors 300.

[0079]The plurality of shrinkage detection sensors 300 are installed in the case 100 and serves to detect a shrinkage amount of the plurality of tubes 200. The plurality of shrinkage detection sensors 300 and the pressurizing member may be electrically connected to a controller, and the controller may control the pressurizing member based on detection data of the plurality of shrinkage detection sensors 300, thereby controlling the shrinkage amount of the plurality of tubes 200.

[0080]In this case, the reason for controlling the shrinkage amount of the plurality of tubes 200 is to prevent the plurality of tubes 200 from shrinking more than necessary. This is because when the plurality of tubes 200 are deformed plastically and lose restoring force, the pump of the present disclosure may lose an ability as the pump 1000.

[0081]A conventional pump consists of only one tube, and as a cylinder operates, a shrinkage amount of the tube is controlled by the supply and release of a pressurized oil of the cylinder to the tube side.

[0082]In contrast, the present disclosure adopts a structure in which the plurality of tubes 200 are contracted simultaneously by the pressurization of the pressurizing member. Here, since each of the plurality of tubes 200 may have different shrinkage characteristics, the shrinkage amount of each of the plurality of tubes 200 is individually detected using a plurality of shrinkage detection sensors 300. In this case, any type of sensor, such as an optical or capacitance type, may be used as the shrinkage detection sensor 300 as long as the sensor may accurately detect the shrinkage amount of the tube 200.

[0083]FIG. 7 is a view illustrating an operating process of the pump of FIG. 2.

[0084]Referring to FIGS. 2, 3, and 7, the chemical suction line L1 may be connected to the chemical suction hole 123a formed on an upper side of the pump 1000, the bubble discharge line L2 may be connected to the bubble discharge hole 123b formed on the upper side of the pump 1000, and the chemical discharge line L3 may be connected to the chemical discharge hole 133a formed on a lower side of the pump 1000.

[0085]Additionally, the pressurizing line L4 may be connected to the pressurizing hole 110a formed on a side portion of the pump 1000, and the exhaust line L5 may be connected to the exhaust hole 110b formed on the side portion of the pump 1000.

[0086]Additionally, a suction valve V1 may be installed in the chemical suction line L1, a discharge valve V2 may be installed in the bubble discharge line L2, a discharge valve V3 may be installed in the chemical discharge line L3, a pressurizing valve V4 may be installed in the pressurizing line L4, and an exhaust valve V5 may be installed in the exhaust line L5.

[0087]First, when the chemical is sucked from the pump 1000, only the suction valve V1 and the exhaust valve V5 may be opened, so that the liquid may be sucked by suction force of the chemical suction line L1 generated by the exhaust of the exhaust line L5.

[0088]Then, when removing the bubbles of the chemical accommodated in the pump 1000, only the discharge valve V2 and the pressurizing valve V4 may be opened to contract the plurality of tubes 200 by the pressurization through the pressurizing line L4, so that the liquid level of the chemical may rise, thereby removing the bubbles of the chemical through the bubble discharge line L2. In this case, the pressurizing force may be applied to the plurality of tubes 200 only to the extent that the chemical is not discharged through the bubble discharge line L2 and only the bubbles of the chemical may be removed.

[0089]Next, when discharging the chemical included in the pump 1000, in a state in which the pressurizing valve V4 is open, the discharge valve V2 may be closed and the discharge valve V3 may be open, so that the plurality of tubes 200 may be further contracted by additional pressure through the pressurizing line L4, thereby discharging the chemical through the chemical discharge line L3. In this case, the discharged chemical may move to the nozzle unit 40 and may be sprayed on the substrate S.

[0090]Although embodiments of the present disclosure have been described with reference to the accompanying drawings, it will be understood by those skilled in the art that the present disclosure may be implemented in other specific forms without changing its technical concepts or essential features. Therefore, it should be understood that the example embodiments described above are exemplary and not limited in all respects.