Cover for substrate holding chuck

[0001]FIG. 1 is an enlarged perspective view of a cover for substrate holding chuck showing my new design;

[0002]FIG. 2 is a front view thereof;

[0003]FIG. 3 is a back view thereof;

[0004]FIG. 4 is a top view thereof;

[0005]FIG. 5 is a bottom view thereof;

[0006]FIG. 6 is a right side view thereof, the left side view thereof being a mirror image;

[0007]FIG. 7 is an enlarged view of the section indicated by line 7-7 of FIG. 4; and,

[0008]FIG. 8 is an enlarged cross-sectional view thereof, taken along line 8-8 of FIG. 7.

[0009]The dash-dash broken lines shown in the figures are for illustrative purposes only and form no part of the claimed design. The dot-dash broken lines shown in the figures are to indicate a boundary between a claimed design and disclaimed portion, and those are not a part of a claimed design or disclaimed portion.