USD1134248S1 · App 29/875,949

Showerhead for semiconductor processing

Publication

Country:US
Doc Number:D1134248
Kind:S1
Date:2026-07-14

Application

Country:US
Doc Number:29/875,949 (29875949)
Date:2023-05-12

Classifications

IPC Classifications

CPC Classifications

Applicants

Lam Research Corporation

Inventors

Yogesh Babbar

Abstract

Ask AI about this patent

Get a summary, plain-language explanation, or ask your own question.

Figures

Description

[0001]FIG. 1 is an isometric view of a first embodiment of a showerhead for semiconductor processing showing my new design.

[0002]FIG. 2 is a bottom view thereof.

[0003]FIG. 3 is a top view thereof.

[0004]FIG. 4 is a front view thereof.

[0005]FIG. 5 is a rear view thereof.

[0006]FIG. 6 is a cross-sectional view taken along line 6-6 in FIG. 2.

[0007]FIG. 7 is a side view thereof.

[0008]FIG. 8 is an opposing side view thereof.

[0009]FIG. 9 is an isometric view of a second embodiment of a showerhead for semiconductor processing showing my new design.

[0010]FIG. 10 is a bottom view thereof.

[0011]FIG. 11 is a top view thereof.

[0012]FIG. 12 is a front view thereof.

[0013]FIG. 13 is a rear view thereof.

[0014]FIG. 14 is a cross-sectional view taken along line 14-14 in FIG. 10.

[0015]FIG. 15 is a side view thereof; and,

[0016]FIG. 16 is an opposing side view thereof.

[0017]The broken lines in the drawings represent portions of the showerhead for semiconductor processing that form no part of the claimed design.

Claims

CLAIM

The ornamental design for a showerhead for semiconductor processing, as shown and described.