Seal member for use in semiconductor production apparatus

[0001]1.1 is a perspective view of a seal member for use in semiconductor production apparatus, showing our new design in accordance with a first embodiment of the present invention;

[0002]1.2 is a front elevation view thereof;

[0003]1.3 is a rear elevation view thereof;

[0004]1.4 is a left side elevation view thereof;

[0005]1.5 is a right side elevation view thereof;

[0006]1.6 is a top view thereof;

[0007]1.7 is a bottom view thereof;

[0008]1.8 is a cross-sectional view thereof;

[0009]1.9 is an enlarged cross-sectional view of a portion thereof;

[0010]1.10 is an enlarged cross-sectional view thereof in a condition of use.

[0011]2.1 is a perspective view of a seal member for use in semiconductor production apparatus, showing our new design in accordance with a second embodiment of the present invention;

[0012]2.2 is a front elevation view thereof;

[0013]2.3 is a rear elevation view thereof;

[0014]2.4 is a left side elevation view thereof;

[0015]2.5 is a right side elevation view thereof;

[0016]2.6 is a top view thereof;

[0017]2.7 is a bottom view thereof;

[0018]2.8 is a cross-sectional view thereof;

[0019]2.9 is an enlarged cross-sectional view of a portion thereof; and

[0020]2.10 is an enlarged cross-sectional view thereof in a condition of use.

[0021]In the Reproductions 1.10 and 2.10, the broken lines are for the purpose of illustrating portions of the seal member for use in semiconductor production apparatus that forms no part of the claimed design.