Seal member for semiconductor production apparatus

[0001]FIG. 1 is a perspective view of a seal member for semiconductor production apparatus, showing our new design;

[0002]FIG. 2 is a front elevation view thereof;

[0003]FIG. 3 is a rear elevation view thereof;

[0004]FIG. 4 is a left side elevation view thereof;

[0005]FIG. 5 is a right side elevation view thereof;

[0006]FIG. 6 is a top view thereof;

[0007]FIG. 7 is a bottom view thereof;

[0008]FIG. 8 is a cross-sectional view thereof taken along line 8-8 shown in FIG. 6; and,

[0009]FIG. 9 is an enlarged cross-sectional view of a portion thereof taken from area 9-9 shown in FIG. 8.