AAC Kaitai Technologies (Wuhan) CO., LTD

The present invention provides a multimass MEMS gyroscope featuring an orthogonal arrangement, which comprises an anchor point unit, a sensing unit and a driving unit; the anchor point unit comprises a central anchor point subunit located at the center of a rectangle and four corner anchor points located at the four corners of the rectangle respectively; the sensing unit comprises four detection mass blocks each of which has a frame structure and is elastically connected between the central anchor point subunit and the corresponding corner anchor point, receding spaces being formed between the detection mass blocks, and four detection decoupling parts; and the driving unit comprises four driving mass blocks, and driving decoupling parts. The gyroscope can improve the arrangement area of transducers and reduce the mass of the detection mass blocks to improve the Coriolis gain, thereby improving the mechanical sensitivity of the gyroscope.

Provided is a fully decoupled MEMS gyroscope, including a base, a sensing unit elastically connected to the base, and a driving unit coupled with the sensing unit and driving the sensing unit to move. The base includes a coupling anchor point located at a center of a rectangle and a coupling structure elastically connected to the coupling anchor point. The driving unit includes four driving members located at inner positions of four corners of the rectangle. The sensing unit includes two X mass blocks symmetrically arranged in two of the avoiding intervals, two Y mass blocks symmetrically arranged in the other two of the avoiding intervals, four Z mass blocks elastically connected to the adjacent driving members and located at the four corners of the rectangle, and four Z detection decoupling members elastically connected to the adjacent Z mass blocks and elastically connected to each other around the rectangle.

Provided are a fully-decoupled three-axis MEMS gyroscope and an electronic product. The gyroscope includes a substrate, an X/Y proof mass, Z proof masses, driving structures, and Z decoupled masses fixed to the substrate. The X/Y proof mass is annularly arranged outside the Z proof masses, the driving structures, and the Z decoupled masses; the X/Y proof masses are arranged oppositely along an x-axis direction; the driving structures are arranged oppositely along the x-axis direction outside the Z proof masses; and the Z decoupled masses are arranged oppositely along the x-axis direction at inner sides of the Z proof masses. The X/Y proof mass is elastically connected to the driving structures adjacent thereto, each Z proof mass is elastically connected to one driving structure adjacent thereto, and each Z decoupled mass is elastically connected to one Z proof mass adjacent thereto. The gyroscope has improved detection precision.

The present invention provides a three-axis gyroscope and electronic products, including a drive structure used for driving the three-axis gyroscope, a first sensitive structure used for sensing an angular velocity in a first direction, a second sensitive structure used for sensing an angular velocity in the second direction, a third sensitive structure used for sensing an angular velocity in a third direction. The first sensitive structure, the second sensitive structure and the third sensitive structure can be mutually coupled in the first detection modality, the second detection modality and the third detection modality, which can effectively avoid the coupling error, achieve electrical orthogonal suppression and capacitance modality matching in the first detection modality, the second detection modality or the third detection modality, so that the structural performance loss can be compensated, thus reducing an orthogonal error and improving the detection accuracy and overall performance of the three-axis gyroscope.

Provided is a fully decoupled MEMS gyroscope, including a base, a sensing unit elastically connected to the base, and a driving unit coupled with the sensing unit and driving the sensing unit to move. The base includes a coupling anchor point located at a center of a rectangle and a coupling structure elastically connected to the coupling anchor point. The driving unit includes four driving members located at inner positions of four corners of the rectangle. The sensing unit includes two X mass blocks symmetrically arranged in two of the avoiding intervals, two Y mass blocks symmetrically arranged in the other two of the avoiding intervals, four Z mass blocks elastically connected to the adjacent driving members and located at the four corners of the rectangle, and four Z detection decoupling members elastically connected to the adjacent Z mass blocks and elastically connected to each other around the rectangle.

A three-axis MEMS gyroscope includes a substrate, a sensing unit connected with the substrate, and a driving unit driving the sensing unit to move. The substrate includes anchor point structures and coupling structures connected with the anchor point structures. The driving unit includes driving pieces. One ends of each of the driving pieces are elastically connected with an adjacent coupling structure. The sensing unit includes X and Y mass blocks and Z mass blocks. Each of the X and Y mass blocks is arranged in a corresponding avoiding space. The X and Y mass blocks are respectively connected with adjacent coupling structures to form a rectangular frame. The Z mass blocks are connected with the driving pieces and separately arranged on one side of each driving piece away from each anchor point structure. The three-axis MEMS gyroscope is differentially driven, which realizes differential detection and reduces quadrature error.

The invention discloses a MEMS gyroscope, including a substrate, a first unit and a second unit, and the first unit and the second unit are relatively arranged on the substrate along the first direction. The first unit is connected to the second unit through a coupling spring, and the substrate is also provided with a driving electrode and a detection electrode. The first unit includes a first weight and a second weight. The second unit includes the third weight and the fourth weight set oppositely along the second direction. The second set of coupling structures are connected to the third weight and fourth weight. Compared with the prior art, the beneficial effect of the present invention is that the MEMS gyroscope adopts a symmetrical layout, which facilitates the realization of differential detection and improves the sensitivity.

Provided is a fully decoupled MEMS gyroscope, including an anchor point unit, a sensing unit elastically connected to the anchor point unit, and a driving unit configured to drive the sensing unit to move. The anchor point unit includes a center anchor point subunit located at a center of a rectangle and four side anchor points. The driving unit includes four driving members located on four sides of the rectangle. The sensing unit includes two X mass blocks symmetrically arranged in two avoiding intervals, two Y mass blocks symmetrically arranged in the other two avoiding intervals, four Z mass blocks respectively located at an outer side of each driving member, and four Z detection decoupling members respectively located at an outer side of each Z mass block. The X mass blocks and the Y mass blocks are respectively connected to each side anchor point.

A MEMS gyroscope for three-axis detection relates to the technical field of gyroscope and includes a substrate, a sensing unit elastically connected with the substrate, and a driving unit coupled with the sensing unit and driving the sensing unit to move. The substrate includes anchor point structures respectively located at four corners of the substrate and four coupling structures respectively elastically connected with the four anchor point structures. An avoiding space is formed between two adjacent coupling structures. The driving unit includes two driving pieces separately elastically connected with adjacent coupling structures. The two driving pieces are symmetrically arranged and are frame-shaped. The sensing unit includes four X and Y mass blocks, two Z mass blocks elastically connected with the driving pieces, and two decoupling mass blocks. The two decoupling mass blocks are elastically connected. The MEMS gyroscope is differentially driven, which realizes differential detection and reduces quadrature error.

A MEMS gyroscope includes an anchor point, a resonator, and a transducer. The resonator includes eight resonating blocks arranged at equal intervals and a coupling beam connecting each two adjacent resonating blocks. The resonating blocks are connected with the anchor point through anchoring beams. The anchoring beams decouple radial motion and circumferential motion of the resonating blocks. The resonating blocks include first resonating blocks, second resonating blocks, third resonating blocks, and fourth resonating blocks. In a vibration mode, the transducer drives the first and second resonating blocks to vibrate along a first axis and a second axis respectively, so the third and fourth resonating blocks are driven to vibrate along the fourth axis and the third axis respectively. In a detection mode, the transducer detects vibration of the third resonating blocks along the third axis and the vibration of the fourth resonating blocks along the fourth axis.