Company patents

FEI Company

FEI Company's patent strategy is heavily concentrated in Electron / Ion Tubes & Discharge, accounting for 72.7% of its portfolio, which saw a significant rebound in 2025 with a 30.1% YoY growth after a decline. While core areas like Material & Chemical Analysis and Image Processing also show substantial presence, the company surprisingly demonstrated a rapid emerging focus in Pattern Recognition & ML Models with a 200.0% YoY growth in 2025, despite a sharp decline so far in 2026, indicating a fluctuating but notable interest in advanced computing applications beyond its traditional hardware strengths.

Patent Trend by Technology Area

Yearly patent publications since 2023

Product themes

Product-level themes inferred from filings since 2023, with category chips showing where each theme appears. Select a theme to filter the patents below.

469 US filings (since 2023) · 12 categories · 26 themes

Charged Particle Beam Optics is up +41.3% YoY. Worth a look.
Charged Particle Beam Optics

Techniques and devices for generating, shaping, focusing, and deflecting electron or ion beams, often involving multi-pole lenses, deflectors, and aberration correction for applications like microscopy or processing.

Electron / Ion Tubes & Discharge
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317since 2023
+41.3%YoY
Ion Implantation Control & Metrology

Methods and apparatus for precise wafer positioning, ion beam uniformity, and dose monitoring during ion implantation processes in semiconductor device manufacturing.

Electron / Ion Tubes & Discharge
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216since 2023
+32.1%YoY
Advanced Etching & Patterning Control

Techniques for precise material removal, pattern shaping, and controlling etch selectivity or uniformity, often involving plasma, wet chemistry, or directed beams to achieve desired features on semiconductor substrates.

Semiconductor Manufacturing Process
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110since 2023
+18.8%YoY
In-situ Process Monitoring

Techniques and systems for real-time or near-real-time measurement and adjustment of semiconductor manufacturing parameters (e.g., temperature, etch rate, ion beam uniformity) to ensure process quality and consistency.

Semiconductor Testing
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60since 2023
-10.5%YoY
Vacuum System & Chamber Evacuation

Techniques and apparatus for achieving and maintaining vacuum conditions within charged particle and plasma processing chambers, including pump control, vacuum degree monitoring, and chamber sealing.

Electron / Ion Tubes & Discharge
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41since 2023
-30.8%YoY
Advanced Material Characterization

Techniques and systems for precisely measuring electrical or electromagnetic properties of materials or components, often involving specialized resonators, waveguides, or multi-range measurement systems to ensure accuracy.

Electrical Measurement
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39since 2023
+55.6%YoY
RF Plasma Power Delivery

Systems and methods for delivering radio frequency (RF) power to plasma processing chambers, including impedance matching, pulse shaping, and feedback control for stable and efficient plasma generation.

Electron / Ion Tubes & Discharge
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27since 2023
+200.0%YoY
Automated Visual Inspection

Systems that employ imaging and image processing to automatically detect defects, verify states, or ensure quality control in manufactured goods, printed materials, or industrial processes.

Material & Chemical Analysis
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24since 2023
-25.0%YoY
Advanced Biomarker Detection Assays

Methods and compositions for identifying, quantifying, or characterizing specific biological molecules (e.g., nucleic acids, proteins, metabolites, antibodies) or microbial species, often for diagnostic, prognostic, or quality control applications.

Material & Chemical Analysis
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23since 2023
-57.1%YoY
Advanced Deposition Chamber Hardware

Design and engineering of specialized components within deposition systems, such as heaters, targets, susceptors, and chamber walls, to achieve precise control over process parameters like temperature, material flux, and plasma characteristics.

Coating & Surface Treatment
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21since 2023
+300.0%YoY
Advanced Optical Imaging & Lens Design

Development of sophisticated optical lens assemblies and computational methods to achieve high-resolution, precise, or specialized imaging, often for medical or scientific applications.

Optical Elements & Systems
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18since 2023
+800.0%YoY
Plasma Process Chamber Engineering

Design and control of plasma processing chambers, including heating, gas delivery, electrode configurations, and magnetic field control for uniform and efficient material processing in semiconductor manufacturing.

Electron / Ion Tubes & Discharge
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14since 2023
+33.3%YoY
Semiconductor Electrical Test

Techniques and apparatus for electrically testing semiconductor devices, integrated circuits, or wafers during manufacturing or post-assembly, including built-in self-test (BIST) and contact reliability assessment.

Electrical Measurement
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10since 2023
-66.7%YoY
Video Quality & Encoding Optimization

Methods and apparatus for improving the visual fidelity, resolution, or compression efficiency of video signals, often through advanced processing, up-scaling, or neural network-based filters.

Computer Vision
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5since 2023
new
3D Reconstruction & Modeling

Processes for creating or manipulating three-dimensional digital representations of objects or environments, including mesh generation, surface fitting, and depth estimation from multiple views.

Image Processing
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5since 2023
+100.0%YoY
Conformal & Selective Film Deposition

Methods for depositing thin films with controlled conformality, thickness, and material properties, including selective deposition on specific areas, often using atomic layer deposition (ALD), chemical vapor deposition (CVD), or epitaxial growth.

Coating & Surface TreatmentSemiconductor Manufacturing Process
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4since 2023
0.0%YoY
AI for Medical Diagnostics

Utilizing machine learning, particularly deep learning, to analyze medical data such as images, sensor readings, or physiological signals for disease prediction, diagnosis, or treatment assessment.

Image ProcessingComputer VisionMachine Learning & AI
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3since 2023
-50.0%YoY
In Vitro Disease Modeling & Cell Engineering

Development and use of engineered biological systems, such as organ-on-a-chip devices, dynamic hydrogels, or genetically modified cells, to mimic physiological conditions, study disease mechanisms, screen compounds, or develop cell-based therapies.

Material & Chemical Analysis
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3since 2023
n/a
Advanced Insulation Materials

Use of specialized materials and structures, such as vacuum insulation panels or phase change materials, to improve thermal efficiency and maintain stable temperatures within refrigeration appliances.

Refrigerators & Cold Storage
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2since 2023
0.0%YoY
Portable Cold Storage

Self-contained or portable units designed for maintaining specific temperatures for food, beverages, or sensitive items during transport, often incorporating active cooling or smart monitoring features.

Refrigerators & Cold Storage
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2since 2023
0.0%YoY
X-ray Tube Design & Cooling

Engineering solutions for X-ray tube components, including integrated cooling systems (e.g., oil circulation) and control mechanisms for tube voltage and current to ensure stable and safe operation.

Electron / Ion Tubes & Discharge
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2since 2023
n/a
Quantum Machine Learningfiltered

Developing and applying machine learning algorithms that leverage quantum computing principles, such as quantum circuits or autoencoders, for tasks like simulation or data processing.

Machine Learning & AI
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2since 2023
n/a
Generative AI for Images

Techniques utilizing deep learning models like Generative Adversarial Networks (GANs) or diffusion models to create new images, modify existing ones, or generate synthetic data based on various inputs or conditions.

Image ProcessingComputer Vision
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1since 2023
new
Multi-modal Sensor Fusion

Techniques for combining data from disparate sensor types (e.g., cameras, radar, mobile device signals) to achieve a more robust and comprehensive understanding of an environment or subject, often leveraging machine learning for interpretation and correlation.

Computer Vision
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1since 2023
new
Chemical Mechanical Planarization & Wet Surface Treatment

Processes involving chemical and mechanical forces to planarize surfaces (CMP) or wet chemical treatments for cleaning, etching, or material removal, often utilizing specialized compositions, nozzles, or fluid management systems.

Semiconductor Manufacturing Process
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1since 2023
new
Temporary Wafer Bonding & Debonding

Methods for temporarily attaching a wafer or substrate to a carrier for thinning, dicing, or other processing, followed by controlled debonding, often using light-sensitive resins, temporary adhesives, or roughened interfaces.

Semiconductor Manufacturing Process
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1since 2023
n/a

Patents

Showing 1-4 of 4

Quantum Machine Learning
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