Gigaphoton Inc.

A chamber apparatus for a laser includes a chamber, a first optical path tube, a window, a resonance vessel, and a nozzle tube. In the chamber, a pair of discharge electrodes are disposed. The first optical path tube communicates with the chamber. The window is configured such that light is incident thereon from a region between the discharge electrodes via an interior of the first optical path tube. The nozzle tube is configured to cause the interior of the first optical path tube to communicate with the resonance vessel.

A laser apparatus includes a first optical element, a second optical element, a first actuator configured to change a first wavelength component included in a pulse laser beam by changing a posture of the first optical element, a second actuator configured to change a second wavelength component included in the pulse laser beam by changing a posture of the second optical element, a first encoder configured to measure a position of the first actuator, a second encoder configured to measure a position of the second actuator, and a processor. The processor reads a first relation and a second relation and performs control of the first actuator based on the first relation and the position of the first actuator measured by the first encoder and control of the second actuator based on the second relation and the position of the second actuator measured by the second encoder.

A laser apparatus according to an aspect of the present disclosure includes: an optical isolator disposed in an optical path between an oscillation-stage laser and an amplification-stage laser configured to amplify, as seed light, linearly polarized pulse laser light output from the oscillation-stage laser and having an ultraviolet wavelength, the optical isolator including a first Faraday rotator configured to rotate a polarization direction of the pulse laser light output from the oscillation-stage laser by a first angle in a first rotation direction by a magnetic field in a first direction, a first polarizer having normalized transmittance greater than or equal to 0.9 for the pulse laser light output from the first Faraday rotator, and a second Faraday rotator configured to rotate the polarization direction of the pulse laser light passing through the first polarizer by a second angle in a second rotation direction opposite to the first rotation direction by a magnetic field in a second direction opposite to the first direction; and a second polarizer disposed in an optical resonator of the amplification-stage laser and having normalized transmittance greater than or equal to 0.9 for the seed light.

An electric component box includes a first box into which a wiring from the extreme ultraviolet light generation chamber device is introduced and capable of being fixed to a placement surface; a second box into which a wiring from the first box is introduced and capable of being switched, by being raised and lowered, between a fixed state and a movable state; and a connection device providing connection as allowing the second box to be rotatable with respect to the first box, from a facing state in which a predetermined side wall of the first box and a predetermined side wall of the second box face each other, in a direction in which the predetermined side wall of the first box and the predetermined side wall of the second box move away from each other, and to be capable of being raised and lowered with respect to the first box.

A training data creation method according to an aspect of the present disclosure is used for machine learning of a learning model for predicting lifetime of a consumable of a laser device. The method includes acquiring first lifetime-related information including data of at least one lifetime-related parameter of the consumable recorded in association with each of numbers of oscillation pulses during a period from start of use to replacement of the consumable, determining a first deterioration degree of the consumable based on the number of oscillation pulses, determining a second deterioration degree of the consumable based on the at least one lifetime-related parameter, determining a third deterioration degree of the consumable based on the first deterioration degree and the second deterioration degree, and creating training data in which the first lifetime-related information and the third deterioration degree are associated with each other.

A laser processing apparatus includes a placement base on which a workpiece is placed, a beam shaping optical system configured to shape laser light in such a way that a laser light irradiated region of a mask configured to block part of the laser light has a rectangular shape having short edges and long edges, a second radiation width of the irradiated region in the direction parallel to the long edges being changeable independently of a first radiation width of the irradiated region in the direction parallel to the short edges, and the irradiated region being movable in the direction parallel to the long edges, a projection optical system configured to project a pattern of the mask on the workpiece placed on the placement base, and a mover configured to be capable of moving the irradiated region in the direction parallel to the short edges.

A laser chamber includes a container configured to accommodate a laser gas; a pair of discharge electrodes; a fan configured to cause the laser gas to circulate; a first guide including a first surface and a second surface, the first surface being configured to guide the laser gas therealong, and the second surface and an inner surface of the container forming a first space that narrows in a first direction toward depth; and a second guide including a third surface configured to guide the laser gas therealong toward a vicinity of the first guide.

A laser apparatus according to an aspect of the present disclosure includes a laser oscillator configured to emit a pulse laser beam, and a first optical pulse stretcher, a second optical pulse stretcher, and a third optical pulse stretcher that are disposed on an optical path of the pulse laser beam. When L1 represents an optical path length of a delay optical path of the first optical pulse stretcher, L2 represents an optical path length of a delay optical path of the second optical pulse stretcher, L3 represents an optical path length of a delay optical path of the third optical pulse stretcher, and n represents an integer equal to or larger than two, L2 is an integral multiple of L1 by an integer equal to or larger than two and L3 satisfies the following condition: (n−0.75)×L1≤L3≤(n−0.25)×L1.

An alignment adjuster includes a first holder made of a first material and configured to support an optical element, a first adjuster including a first expandable/contractable section made of a second material different from the first material and configured to rotate the first holder and the optical element around a first axis by adjusting the length of the first expandable/contractable section with the first expandable/contractable section being in contact with the first holder, and a first support member made of the second material and configured to support the first adjuster, and the first adjuster is configured to be capable of adjusting the position where the first expandable/contractable section and the first holder are in contact with each other to be located in a first plane containing a first end section of the first support member and the first axis.

A pulse laser power source includes a step-up transformer in which a pulse current flows to a primary side, a first magnetic pulse compression circuit transferring charge of the first transfer capacitor to a second transfer capacitor, a second magnetic pulse compression circuit transferring charge of the second transfer capacitor to a peaking capacitor, a reset circuit including reset windings performing magnetic reset, and a series circuit of a resistor and an inductor connected in parallel to the peaking capacitor. A resistance value of the resistor is in a range of 100 to 1000Ω inclusive. An inductance L of the inductor satisfies ((ωL) 2 +R 2 ) 1/2 >1/ωCp and L≤(1/Rep−Tm)×R/2, where a capacitance of the peaking capacitor is Cp, a resonance angular frequency during transfer of charge from the second transfer capacitor to the peaking capacitor is ω, a repetition frequency is Rep, and a required time for the magnetic reset is Tm.