Hutchinson Technology Incorporated

SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.

The present embodiments relate to a bistable SMA actuator. The bistable SMA actuator as described herein can include a two-position actuator to move a bistable structure between two positions. Multiple SMA actuators can be disposed opposite one another to move the bistable structure between the two positions. For example, a first SMA actuator can actuate to move the bistable structure from a first position to a second position. After actuation by the first SMA actuator, the actuator can de-actuate, and the bistable structure can use spring force to hold the bistable structure in the second position. The bistable structure can include multiple springs that use force(s) from the springs to hold the bistable structure at a position with zero external force provided by the SMA actuators.

A buckler wire actuator assembly is provided herein. The buckler wire actuator assembly includes at least one buckler frame mounted onto a base of the buckler wire actuator assembly and including at least one isolated electrical conductor. The buckler wire actuator assembly also includes a first SMA wire in electrical connection to one of the at least one isolated electrical conductor a second SMA wire opposite the first SMA wire. The first and second SMA wires are arranged in series to enable both the first and second SMA wires to receive equal current from a current input.

The present embodiments relate to a shape memory alloy (SMA) actuator with a reduced number of materials for manufacturing the actuator. In some instances, elements of the SMA actuator can comprise a dielectric material disposed on the actuator via an injection molding process. In other instances, the SMA actuator can dispose SMA wires above a base of the SMA actuator without the use of any dielectric material. In a first example, an SMA actuator can include a carriage and a base. The base can include a fixed end fixed to the carriage, a free end, a beam connecting the fixed end and the free end, and at least one SMA wire. The SMA actuator can also include an insulator comprising a dielectric material electrically isolating a set of electrical contacts at the fixed end.

The present embodiments relate to a shape memory alloy (SMA) sensor being part of a switch. For instance, an SMA sensor can include an actuator configured to engage with a locking mechanism that modifies the resistance of the SMA sensor when the locking mechanism is in the locked position. The resistance of the SMA sensor can be unmodified by an external magnetic field, increasing reliability of the SMA sensor resistance determining a state of the locking mechanism. Another example, SMA sensor is an SMA wire being in contact with a locking mechanism in the locked position, thereby increasing a resistance of the SMA wire in the locked position.

The present embodiments relate to a shape memory alloy (SMA) actuator with a reduced number of materials for manufacturing the actuator. In some instances, elements of the SMA actuator can comprise a dielectric material disposed on the actuator via an injection molding process. In other instances, the SMA actuator can dispose SMA wires above a base of the SMA actuator without the use of any dielectric material. In a first example, an SMA actuator can include a carriage and a base. The base can include a fixed end fixed to the carriage, a free end, a beam connecting the fixed end and the free end, and at least one SMA wire. The SMA actuator can also include an insulator comprising a dielectric material electrically isolating a set of electrical contacts at the fixed end.

SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.

The present embodiments relate to a shape memory alloy (SMA) actuator with a joint between an SMA wire the SMA actuator being disposed at a bottom surface of the SMA actuator. The SMA actuator can include at least one fixed end configured to be fixed to a carriage, at least one free end, at least one beam connecting the fixed end and the free end, and at least one SMA wire. The at least one SMA wire can be electrically connected to the at least one fixed end and the at least one free end via electrical contact portions. The position of the at least one SMA wire being affixed to the bottom surface can allow for reduced stress and a wire exit angle at the weld joint between each SMA wire and the actuator, improving resiliency of the SMA actuator.

SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.

Treatment solutions and methods for treating a substrate including forming a first layer on a surface of the substrate, providing a process gas to the one or more plasma sources, the process gas includes a gas mixture of a reactive gas species and an inert gas species; forming a plasma under vacuum in the one or more plasma sources; and exposing the substrate to the plasma under vacuum to treat the first layer on the surface of the substrate.