INNOSCIENCE (SUZHOU) TECHNOLOGY CO., LTD.

A semiconductor device includes a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, a source electrode and a drain electrode, a gate structure, a first passivation layer, a second passivation layer and a field plate. The second nitride-based semiconductor layer is disposed on the first nitride-based semiconductor layer. The source electrode, the drain electrode, and the gate structure are disposed above the second nitride-based semiconductor layer. The first passivation layer is disposed above the second nitride-based semiconductor layer and covers the gate structure. The second passivation layer is disposed above the first passivation layer and in a region between the source and drain electrodes. The field plate is disposed above the second passivation layer and in the region between the source electrode and drain electrode, in which the field plate contacts at least one enclosed air gap above the first passivation layer.

A nitride-based semiconductor device includes a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, a gate electrode, a first source electrode, a second source electrode, and a drain electrode. The second nitride-based semiconductor layer includes a drift region doped, a first barrier region, and a second barrier region. The first and second barrier regions extend downward from a top surface of the second nitride-based semiconductor layer and are separated from each other by a portion of the drift region. The gate electrode is disposed on the first barrier region. The first source electrode is disposed on the portion of the drift region. The second source electrode is disposed on the second barrier region and is electrically coupled with the first source electrode. The drain electrode is connected to the first nitride-based semiconductor layer.

A semiconductor device includes a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, a gate electrode, a source electrode, a drain electrode, and a group of negatively-charged ions. The gate electrode is located between the source and drain electrodes to define a drift region between the gate and drain electrodes. A group of negatively-charged ions are implanted into the drift region and over the 2DEG region and spaced apart from the gate and drain electrodes and spaced apart from an area directly beneath the gate and drain electrodes. The gate electrode is closer to the negatively-charged ions than the drain electrode, such that the negatively-charged ions deplete at least one portion of the 2DEG region which is near the gate electrode.

A semiconductor device includes a first and a second nitride-based semiconductor layers, a source electrode, a drain electrode, a gate electrode, and a first and a second stress modulation layers. The first nitride-based semiconductor layer has a first thickness. The second nitride-based semiconductor layer has a bandgap less than a bandgap of the first nitride-based semiconductor layer to form a heterojunction therebetween. The second nitride-based semiconductor layer has a second thickness, and a ratio of the first thickness to the second thickness is in a range from 0.5 to 5. The first and the second stress modulation layers provide a first and a second drift regions of the second nitride-based semiconductor layer with stress, respectively, resulting in induction of a first and a second 2DHG regions within the first and the second drift regions, respectively.

A semiconductor device includes a first and a second nitride-based semiconductor layers, a first and a second electrodes, a first and a second gate electrodes, a first and a second passivation layers and a conductive layer. The first passivation layer has a first portion covered with a first end portion of the first field plate and a second portion free from coverage of the first field plate. The second passivation layer has a first portion covered by the conductive layer and a second portion free from coverage of the conductive layer. A thickness difference between the first and the second portions of the first passivation layer is less than a thickness difference between the first and the second portions of the second passivation layer.

A nitride-based semiconductor device includes a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, a third nitride-based semiconductor layer, a passivation layer, a gate insulator layer, and a gate electrode. The first nitride-based semiconductor layer includes at least two doped barrier regions defining an aperture between the doped barrier regions. The second nitride-based semiconductor layer is disposed over first nitride-based semiconductor layer. The third nitride-based semiconductor layer is disposed on the second nitride-based semiconductor layer and has a bandgap higher than a bandgap of the second nitride-based semiconductor layer. The passivation layer is disposed over the third nitride-based semiconductor layer, in which a vertical projection of the passivation layer on the first nitride-based semiconductor layer is spaced apart from the aperture. The gate insulator layer is disposed over the third nitride-based semiconductor layer. The gate electrode is disposed over the gate insulator layer and aligns with the aperture.

A semiconductor device includes a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, a first gate electrode, a first S/D electrode, and a first field plate. The second nitride-based semiconductor layer is disposed on the first nitride-based semiconductor layer. The first and second nitride-based semiconductor layers collectively have an active portion and an electrically isolating portion that is non-semi-conducting and surrounds the active portion to form at least two interfaces extending along a first direction and spaced apart from each other by the active portion. The first gate electrode and the first S/D electrode are disposed above the second nitride-based semiconductor layer. The first field plate is disposed above the second nitride-based semiconductor layer and extends along the second direction and across the two interfaces such that the field plate extends to the electrically isolating portion, and overlaps with the first gate electrode near the interfaces.

A nitride-based semiconductor device includes a first and second nitride-based semiconductor layers, two or more source/drain (S/D) electrodes, a gate electrode, a doped III-V semiconductor layer, a gate protection layer and a first passivation layer. The doped III-V semiconductor layer is disposed between the second nitride-based semiconductor layer and the gate electrode. The gate protection layer caps the gate electrode and the doped III-V semiconductor layer and is separated from the S/D electrodes. The first passivation layer covers the second nitride-based semiconductor layer and the gate protection layer and abuts against sidewalls of the S/D electrodes which are separated from the gate protection layer by the first passivation layer.

A semiconductor device includes a drain electrode, a first source electrode, a second source electrode, a first gate electrode, and a second gate electrode. The first gate electrode is arranged between the first source electrode and the drain electrode. The first gate electrode extends along a first direction. The second gate electrode is arranged between the second source electrode and the drain electrode. The second gate electrode extends along the first direction. The first gate electrode is arranged above a first imaginary line substantially perpendicular to the first direction in a top view of the semiconductor device and the second gate electrode is arranged below a second imaginary line substantially perpendicular to the first direction in the top view of the semiconductor device.

A nitride-based semiconductor device includes a substrate, a buffer, a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, a S/D electrode, a second S/D electrode, and a gate electrode. The buffer is disposed over the substrate and includes at least one layer of a nitride-based semiconductor compound doped with an acceptor at a top-most portion of the buffer. The first and second nitride-based semiconductor layers are disposed over the buffer. The first S/D electrode is disposed over the second nitride-based semiconductor layer, in which the first S/D electrode extends downward to a position lower than the first nitride-based semiconductor layer, so as to form at least one first interface with the top-most portion of the buffer, making contact with the at least one layer of the nitride-based semiconductor compound. The second S/D electrode and the gate electrode are disposed over the second nitride-based semiconductor layer.