Moxtek, Inc.

An x-ray window 60 or 70 can include a thin film 61 sealed to a support structure 10 . The support structure 10 can include an outer ring 11 encircling an outer ring aperture 15 , an inner ring 12 encircling an inner aperture, and multiple spokes 13 . The inner ring 12 can be located in the outer ring aperture 15 . The inner ring 12 can be attached to the outer ring 11 by the multiple spokes 13 . The support structure 10 shapes can optimize strength and percent open area.

The wire grid polarizers 10 and 30 described herein, and wire grid polarizers made by methods described herein, can have high performance across a broad range of the ultraviolet spectrum and across a broad angle of incidence. These polarizers can be durable (resistant to heat, moisture, ultraviolet light, and oxidation). The polarizer can include an array of wires 15 on a substrate 11 . Each wire 15 can have a silicon core 12 and a pair of silicon dioxide ribs 13 . The core 12 can be sandwiched between the pair of ribs 13 , with each rib 13 adjacent to a sidewall 12 s of the core 12 . A rib width W 13 can be ≥ 4 nm. Each wire 15 can also include a silicon dioxide cap 14 . The core 12 can be encircled by a silicon dioxide ring 17 .

A mounted x-ray window 10 and 20 can include an x-ray window 18 mounted on the flange 11 f of a housing 11 . The x-ray window 18 can include the following layers: a top strong layer 17 , a stress-relief layer 16 , a bottom strong layer 15 , an adhesive layer 14 then a support ring 13 . These layers can have a material composition and thickness for optimizing x-ray window low gas permeability, low outgassing, high strength, low visible and infrared light transmission, high x-ray flux, low atomic number materials, corrosion resistance, high reliability, and low-cost.

A filament assembly 10 for an x-ray tube 20 can include a planar filament 11 electrically-coupled between and substantially-encircled by a pair of collector plates C 1 and C 2 . The pair of collector plates C 1 and C 2 can support the planar filament 11 so that it does not twist or warp and align the filament assembly 10 within a cathode cup 33 . The pair of collector plates C 1 and C 2 can block electrons emitted from a back side of the filament. Without the collector plates C 1 and C 2 , back side electrons can change direction by about 180°, hit the target, and distort a target electron spot. Each collector plate C 1 or C 2 can include holes H 1 and H 2 . These holes H 1 and H 2 can aid in alignment of the collector plates C 1 and C 2 with electrodes 31 and electrode 32 , can allow welding at a lower temperature, and can facilitate weld inspection.

The waveplates herein (A) can have high performance across a broad wavelength range and broad range of incident angles; (B) can be thin; and (C) can withstand a high temperature. The waveplates can include ribs 12 on a substrate 11 with a channel 13 between each pair of adjacent ribs 12 . Each rib 12 can include the following layers in the following order moving outward from the substrate: a bottom-medium-layer BM (n BM ), a high-layer H (n H ), then a top-medium-layer TM (n TM ). Each rib 12 can be located on a bottom-low-layer BL (n BL ). A top-low-layer TL (n TL ) can be located on a face TM F of the top-medium-layer TM farthest from the substrate 11 . Relationships between indices of refraction of these layers can be n BL <n BM <n H and n TM <n TM <n H .

Optical metasurfaces can manipulate a light wavefront without traditional lenses. They can include pillars with subwavelength dimensions on a substrate. The pillars can vary in size, shape, and spacing across a surface of the substrate. Each pillar size and shape can diffract incident light and provide a unique electromagnetic response. The metasurface can provide desired light wavefront manipulation without the thickness of traditional lenses. The metasurface can overcome the aberration problem of traditional lenses. An overcoat layer can be located at a distal-end of the pillars. Pillar pitch can be adjusted for uniform spacing between pillars, and uniform overcoat coverage. The overcoat layer can protect the pillars. An alternative to the overcoat layer is a solid fill-material filling gaps between the pillars.

An x-ray window 60 or 70 can include a thin film 61 sealed to a support structure 10 . The support structure 10 can include an outer ring 11 encircling an outer ring aperture 15 , an inner ring 12 encircling an inner aperture, and multiple spokes 13 . The inner ring 12 can be located in the outer ring aperture 15 . The inner ring 12 can be attached to the outer ring 11 by the multiple spokes 13 . The support structure 10 shapes can optimize strength and percent open area.

The wire grid polarizers 10 and 30 described herein, and wire grid polarizers made by methods described herein, can have high performance across a broad range of the ultraviolet spectrum and across a broad angle of incidence. These polarizers can be durable (resistant to heat, moisture, ultraviolet light, and oxidation). The polarizer can include an array of wires 15 on a substrate 11 . Each wire 15 can have a silicon core 12 and a pair of silicon dioxide ribs 13 . The core 12 can be sandwiched between the pair of ribs 13 , with each rib 13 adjacent to a sidewall 12 s of the core 12 . A rib width W 13 can be ≥4 nm. Each wire 15 can also include a silicon dioxide cap 14 . The core 12 can be encircled by a silicon dioxide ring 17.

A collimator for an x-ray tube can be a monolithic, integral structure. The collimator can include a proximal-end closest to a cathode and a distal-end farthest from the cathode. The proximal-end can adjoin a vacuum inside of the x-ray tube. The distal-end can adjoin the air. The collimator can include an aperture extending therethrough. An x-ray window can be mounted across the aperture. The aperture can include a collimation-region between the x-ray window and the distal-end, and a drift-region between the x-ray window and the proximal-end. X-rays can be generated inside of the collimator.

Optical metasurfaces can manipulate a light wavefront without traditional lenses. They can include pillars with subwavelength dimensions on a substrate. The pillars can vary in size, shape, and spacing across a surface of the substrate. Each pillar size and shape can diffract incident light and provide a unique electromagnetic response. The metasurface can provide desired light wavefront manipulation without the thickness of traditional lenses. The metasurface can overcome the aberration problem of traditional lenses. An overcoat layer can be located at a distal-end of the pillars. Pillar pitch can be adjusted for uniform spacing between pillars, and uniform overcoat coverage. The overcoat layer can protect the pillars. An alternative to the overcoat layer is a solid fill-material filling gaps between the pillars.