nLIGHT, Inc.

A laser scan head includes a laser to generate a laser beam, one or more optical elements to direct the laser beam to a workpiece, one or more galvo drivers connected to the one or more optical elements to control positions of the one or more optical elements, one or more position detectors associated with the one or more galvo drivers to detect positions of the one or more galvo drivers at predetermined time intervals and generate position signals, at least one photodiode to detect light reflected from the surface of the workpiece at the predetermined time intervals and generate reflected light signals, and at least one controller to receive the position signals and the reflected light signals to associate the position signals with the reflected light signals.

A laser processing system has a laser source and a divergence-tuning beam characteristic conditioner configured to, in response to a control input, repetitively change a variable divergence laser beam between a first divergence and a second divergence that is different from the first divergence. The system also includes a process head having a collimating lens and a focusing lens. And the system includes a delivery fiber coupled to the divergence-tuning beam characteristic conditioner for guiding the variable divergence laser beam and launching it to the process head. The collimating lens is configured to receive the variable divergence laser beam and direct it as an intermediate beam to the focusing lens to focus the intermediate beam toward the workpiece at a first depth corresponding to the first divergence and at a second depth corresponding to the second divergence.

Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.

A method of processing by controlling one or more beam characteristics of an optical beam may include: launching the optical beam into a first length of fiber having a first refractive-index profile (RIP); coupling the optical beam from the first length of fiber into a second length of fiber having a second RIP and one or more confinement regions; modifying the one or more beam characteristics of the optical beam in the first length of fiber, in the second length of fiber, or in the first and second lengths of fiber; confining the modified one or more beam characteristics of the optical beam within the one or more confinement regions of the second length of fiber; and/or generating an output beam, having the modified one or more beam characteristics of the optical beam, from the second length of fiber. The first RIP may differ from the second RIP.

Fiber bending mechanisms vary beam characteristics by deflecting or bending one or more fibers, by urging portions of one or more fibers toward a fiber shaping surface having a selectable curvature, or by selecting a fiber length that is to be urged toward the fiber shaping surface. In some examples, a fiber is secured to a flexible plate to conform to a variable curvature of the flexible plate. In other examples, a variable length of a fiber is pulled or pushed toward a fiber shaping surface, and the length of the fiber or a curvature of the flexible plate provide modification of fiber beam characteristics.

Methods include directing a laser beam to a target along a scan path at a variable scan velocity and adjusting a digital modulation during movement of the laser beam along the scan path and in relation to the variable scan velocity so as to provide a fluence at the target within a predetermined fluence range along the scan path. Some methods include adjusting a width of the laser beam with a zoom beam expander. Apparatus include a laser source situated to emit a laser beam, a 3D scanner situated to receive the laser beam and to direct the laser beam along a scan path in a scanning plane at the target, and a laser source digital modulator coupled to the laser source so as to produce a fluence at the scanning plane along the scan path that is in a predetermined fluence range as the laser beam scan speed changes along the scan path.

Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.

A laser patterning alignment method provides a way to position a target at a working distance in a laser patterning system such that fiducial marks on the target are positioned in view of at least three laser patterning system cameras, and with each laser patterning system camera, to locate a fiducial mark on the target and sending location data of the located fiducial mark to a controller, to determine corrections required to align expected fiducial mark locations with the sent fiducial mark location data, and to adjust the laser patterning system with the determined corrections.

A method of processing by controlling one or more beam characteristics of an optical beam may include: launching the optical beam into a first length of fiber having a first refractive-index profile (RIP); coupling the optical beam from the first length of fiber into a second length of fiber having a second RIP and one or more confinement regions; modifying the one or more beam characteristics of the optical beam in the first length of fiber, in the second length of fiber, or in the first and second lengths of fiber; confining the modified one or more beam characteristics of the optical beam within the one or more confinement regions of the second length of fiber; and/or generating an output beam, having the modified one or more beam characteristics of the optical beam, from the second length of fiber. The first RIP may differ from the second RIP.

A scanned optical beam is divided so as to form a set of scanned subbeams. To compensate for scan errors, a portion of at least one subbeam is detected and a scan error estimated based on the detected portion. A beam scanner is controlled according to the estimated error so as to adjust a propagation direction of some or all of the set of scanned subbeams. The scanned subbeams with adjusted propagation directions are received by an f-theta lens and directed to a work piece. In typical examples, the portion of the at least one subbeam that is detected is obtained from the set of scanned subbeams prior to incidence of the scanned subbeams to the f-theta lens.