Orbotech Ltd.

An electro-optic modulator is disclosed with reduced switching voltage. The electro-optic modulator includes a modulator material film layer. The modulator material film layer includes a polymer matrix. Droplets of liquid crystals are dispersed within the polymer matrix. The liquid crystals are configured to modulate light transmissivity through the electro-optic modulator. Alkanes are dispersed within the droplets. The alkane additives reduce the switching voltage of the electro-optic modulator. n-decane and mineral oil compositions are experimentally demonstrated to reduce the switching voltage.

The system includes a thermal subsystem, an optical subsystem, and a processor. The thermal subsystem comprises a first laser light source configured to emit laser light, a first focusing lens configured to direct the laser light onto a workpiece, and a thermal camera configured to capture a thermal image of the workpiece. The optical subsystem includes at least one light source configured to emit laser light with at least one illumination modality, at light focusing lens configured to direct the light onto the workpiece, and a detector configured to capture at least one image of the workpiece. The processor is configured to compare the at least one image received from the detector to at least one reference image for registration of the workpiece or to determine presence of a surface defect on the workpiece, and to determine presence of a bulk defect in the workpiece based on the thermal image.

A method for defect mitigation is disclosed. The method may include receiving defect data for one or more defects of one or more samples. The defect data may include a defect location, a defect size, a defect shape, or a relationship between the defect and a component of the one or more samples. The method may include identifying at least one defect as a disqualifying defect based on the received defect data and one or more predetermined thresholds. Upon identifying the defect as a disqualifying defect, the method may include generating a tool readable index configured to cause one or more downstream fabrications tool to adjust one or more downstream fabrication steps corresponding to the disqualifying defect based on the generated tool readable index. The method may include providing the generated tool readable index to the one or more downstream fabrication tool.

A collection system may include sensors with optical axes which are aligned through a beamsplitter. The sensors may be affixed to printed circuit boards which may in turn be affixed to camera bases. The camera bases may be affixed to static bases through glue layers and blocks. The static bases may extend orthogonally from and may be affixed to the baseplate. Thus, the alignment of the sensors may be maintained by the baseplate through the printed circuit boards, the camera bases, the glue layers, the blocks, and the static bases. The glue layers may also provide six degrees-of-freedom during the alignment before the glue layers are adhered.

The system includes a light source that emits partially coherent or coherent light split into a reference beam and an object beam and a stage that supports a workpiece in a path of the object beam, that is transmitted through the workpiece. The workpiece includes a vertical interconnect access (VIA) extending from a first side to a second side of the workpiece. A first beam splitter combines the reference beam with the object beam transmitted through the workpiece into a combined beam, and a camera detects the combined beam received. A processor generates an interference image of the workpiece based on the combined beam, determines amplitude and phase information of the object beam based on the interference image, generates a plurality of depth images of the workpiece based on the amplitude and phase information, and determines a critical dimension (CD) of the VIA based on the plurality of depth images.

A donor composition used in a substrate repair process includes a donor substrate. The donor composition also includes a first layer of a first metallic material disposed adjacent to the donor substrate. The donor composition further includes a second layer of a second metallic material disposed adjacent to the first layer. The donor composition yet further includes a third layer of a third metallic material disposed adjacent to the second layer. The donor composition also includes a plurality of deposition layers of one or more metallic materials disposed adjacent to the third layer.

The system includes a light source that emits partially coherent or coherent light split into a reference beam and an object beam and a stage that supports a workpiece in a path of the object beam that is transmitted through the workpiece. A first beam splitter combines the reference beam with the object beam transmitted through the workpiece into a combined beam, and a camera detects the combined beam. A processor generates a first interference image of the workpiece based on the combined beam, determines amplitude and phase information of the object beam based on the first interference image, generates a plurality of depth images of the workpiece based on the amplitude and phase information, determines a focus score of each pixel of the plurality of depth images, and generates a first 3D map of the workpiece based on the focus scores, which includes depth-integrated refractive index (DIRI) information.

A 3D surface map of a workpiece is determined using an interferometric quantitative phase imaging technique. The workpiece includes a transparent thin film or layers stack. The 3D surface map is corrected based on a thickness and a refractive index of the transparent thin film or layers stack. This technique can be used with an inspection system configured to perform an interferometric quantitative phase imaging.

A method, a computerized apparatus and a computer program product for adaptive learning for image classification. The method comprises applying a set of classification models on a calibration dataset and on a production dataset, and calculating disagreement measurements over the predictions thereof on each dataset. Based on similarity measurement between the disagreement measurement of the calibration and the production datasets, being below a predetermined threshold, a data drift is indicated in the production dataset. The method further comprises determining a training dataset for training a classification model for the production dataset. The training dataset is selected over a plurality of sets of images ordered according to time intervals in which images therein are obtained. The selection is performed based on weights determined for the plurality of sets.

The system includes a light source, a stage, a camera, and a mirror. The light source is configured to emit light. The stage is configured to support a workpiece and is movable to scan the light across the workpiece disposed on the stage. The camera is configured to receive reflected light from the workpiece and capture an image of the workpiece based on the reflected light received within an exposure time. The mirror is configured to direct the reflected light to the camera and rotate at a constant velocity that is synchronized with a velocity of the stage and the exposure time of the camera.