Company patents
SHIN-ETSU CHEMICAL CO., LTD.
SHIN- ETSU CHEMICAL CO., LTD. demonstrates a strong, sustained focus on Photolithography, which constitutes 36.0% of its portfolio and saw consistent growth of +15.2% in 2024 and +17.0% in 2025, despite a partial decline so far in 2026. While maintaining its core in materials, the company showed an emerging focus in Coating Compositions (Paints, Inks) with a significant +73.7% YoY growth in 2024, and a notable surge in Semiconductor Manufacturing Process patents with a +61.8% YoY increase in 2024, indicating a strategic expansion within the semiconductor sector beyond just photolithography materials.
Patent Trend by Technology Area
Yearly patent publications since 2023
Product themes
Product-level themes inferred from filings since 2023, with category chips showing where each theme appears. Select a theme to filter the patents below.
1,657 US filings (since 2023) · 12 categories · 44 themes
Methods and equipment for applying photoresist uniformly onto wafers, forming patterns through various exposure techniques (e.g., direct imaging, multi-exposure), and integrating patterned layers into semiconductor structures or packaging.
Development of novel chemical compositions for photoresists, including polymers, sensitizers, and crosslinking agents, to achieve improved lithographic performance such as resolution, sensitivity, line edge roughness, and etch resistance.
Synthesis and modification of polysiloxane polymers to introduce specific functional groups or structures, enhancing properties for applications like composites, coatings, biomedical uses, or powder treatment.
Light-initiated polymerization processes used to create structures, coatings, or components, particularly for electronic devices, displays, or additive manufacturing, often involving photoinitiators and specific monomer/oligomer compositions.
Techniques for precise material removal, pattern shaping, and controlling etch selectivity or uniformity, often involving plasma, wet chemistry, or directed beams to achieve desired features on semiconductor substrates.
Innovations in the design, materials, and manufacturing of lithography masks, including reflective masks, programmable masks, and defect mitigation strategies, to enable finer feature patterning and process control.
Organometallic or organosilicon compounds used as catalysts to facilitate polymerization reactions, such as olefin metathesis, or as crosslinkers and modifiers to enhance the properties of polymer compositions like silicones.
Polymer compositions incorporating inorganic or organic filler materials to impart specific functional properties such as thermal conductivity, flame retardancy, electrical conductivity, or enhanced mechanical strength and dimensional stability.
Novel formulations and mechanisms for initiating or controlling the polymerization and cross-linking of adhesives, including dual-curing systems, radical polymerization, and partial curing for tailored material properties.
Additives or compositions specifically formulated for surface application or modification to impart protective, decorative, or specialized functional properties to polymer products.
Synthesis and formulation of polymers, such as epoxy resins, polyimides, or ionic binders, tailored for specific functions in electronic components like sealing, insulation, or energy storage.
Polymer compositions engineered for enhanced heat resistance, thermal stability in molten states, or improved processability at high temperatures, often involving specific copolymers, blends, or stabilizing additives for applications in electronics or automotive.
Components, processes, and methods specifically designed for Extreme Ultraviolet (EUV) lithography, including light sources, reflective optics, masks, pellicles, and contamination control mechanisms.
Methods for depositing thin films with controlled conformality, thickness, and material properties, including selective deposition on specific areas, often using atomic layer deposition (ALD), chemical vapor deposition (CVD), or epitaxial growth.
Materials added to polymers to modify their thermal transfer properties, typically increasing conductivity for heat dissipation in applications like electronics or battery packs.
Polymer compositions tailored for medical and biological applications, including implantable devices, drug delivery systems, and diagnostic tools, emphasizing properties like biocompatibility, hydrolysis resistance, optical clarity, and specific mechanical characteristics.
Chemical additives or surface treatment methods aimed at improving the bonding strength of adhesives to various substrates, including those with challenging surface chemistries or contaminants.
Substances incorporated into polymer systems to control or enhance adhesive properties, cross-linking reactions, or processing characteristics such as mold release and flow.
Methods for temporarily attaching a wafer or substrate to a carrier for thinning, dicing, or other processing, followed by controlled debonding, often using light-sensitive resins, temporary adhesives, or roughened interfaces.
Methods for synthesizing polyurethanes and polyureas, including non-isocyanate routes, using various monomers, catalysts, and curing agents, often for foams, coatings, or adhesives.
Synthesis and application of crosslinked polymer networks designed to swell in water, often for medical, sensing, or smart material applications, exhibiting properties like hydrolysis resistance, thermochromism, or radiation protection.
Methods and apparatus for the efficient and selective production of organic compounds, including amines, acids, and esters, often involving catalytic or continuous processes and purification steps.
Development of adhesive compositions that are applied in a molten state and solidify upon cooling, focusing on specific polymer blends, additives, and their resulting mechanical or optical properties.
Synthesis and application of organic compounds designed to impart specific functionalities in material science, such as photosensitivity or charge transport, for electronic or optical devices.
Development and application of polymer compositions designed for reprocessability, recyclability, or incorporating sustainable additives, often featuring reversible bonds or bio-based components.
Chemical compounds developed for applications in energy storage devices, such as rechargeable lithium batteries, often functioning as electrolyte additives to improve performance, safety, or lifespan.
Methods for creating fine polymer particles, powders, or microspheres with controlled size, morphology, and distribution, used as raw materials or for specific applications.
Adhesive technologies focused on environmental benefits such as biodegradability, natural origin, or designed for easy debonding and re-bonding to facilitate recycling, reuse, or specific application needs.
Techniques for manufacturing thin polymer layers, sheets, or multi-layer structures, often optimized for specific properties such as flexibility, barrier function, filtration, or mechanical strength.
Adhesive systems designed to lose their adhesive properties or debond upon exposure to specific wavelengths of light, often utilized for temporary bonding in sensitive manufacturing processes like semiconductor fabrication.
Development of rubber and elastomer compositions, often involving specific polymer blends, additives (e.g., process oils, reinforcing agents), and cure packages, to achieve desired mechanical properties like abrasion resistance, wet grip, shear durability, or flexibility for demanding applications.
Methods for producing organic chemicals from biomass or through fermentation processes, often focusing on carbohydrates or fatty acid derivatives for food, health, or industrial applications.
Systems and methods for automated substrate transport, precise positioning, temperature regulation, and chamber environment management to ensure process stability, uniformity, and yield in semiconductor manufacturing.
Design and synthesis of acyclic or carbocyclic organic compounds that selectively modulate specific biological targets or pathways for the treatment of diseases.
Novel methods and reactor designs for polymer synthesis, focusing on improving efficiency, achieving continuous production, or controlling specific polymer architectures and product morphologies like particle size or sheet formation.
Adhesive compositions specifically formulated to bind active materials within battery electrodes, emphasizing properties like electrolyte resistance, adhesion to current collectors, and processability for manufacturing.
Methods and catalyst systems, often supported (e.g., on silica or alumina), for the synthesis of polyolefins like polyethylene and polypropylene, focusing on controlling molecular weight, distribution, and polymer morphology.
Techniques and apparatus for measuring critical dimensions, overlay accuracy, defect detection, and surface topography in lithographic processes, often involving optical, laser, or charged particle beams.
Synthesis and formulation of epoxy resins, often derived from phenolic precursors like cardanol and vanillin, for applications requiring specific thermal, mechanical, or electrical properties.
Adhesive formulations designed for high transparency and minimal light distortion, primarily used in optical components, display devices, and protective films where visual clarity is paramount.
Synthesis and modification of high-performance thermoplastic polymers, such as poly(arylene ether ketone) (PAEK) or polycarbonates, to achieve enhanced thermal stability, mechanical strength, or specific processing characteristics.
Multi-layer polymer films engineered to provide superior barrier properties against gases (e.g., oxygen), moisture, or aromas, often incorporating heat-sealing or resealing mechanisms for food and product preservation.
Design and engineering of specialized components within deposition systems, such as heaters, targets, susceptors, and chamber walls, to achieve precise control over process parameters like temperature, material flux, and plasma characteristics.
Application of protective layers to improve the durability and longevity of components by enhancing resistance to wear, oxidation, or chemical degradation in demanding operational environments.
Patents
Showing 1-10 of 84
EUV Lithography Systems