Sinfonia Technology Co., Ltd.

A load port includes: a base; a mounter mounting thereon a container accommodating substrates; a scanner detecting the substrates; and a determiner making a determination regarding a state of each substrate detected by the scanner, wherein the scanner detects first to third portions of an end surface of each substrate, while a fixed state, in which the container is mounted on the mounter and an angle of the container about a vertical axis with respect to the base is fixed, is maintained, and wherein the determiner determines whether each substrate is normally accommodated in the container by using information on a first position and information on a second position, and calculate an amount of vertical deflection of a substrate normally accommodated in the container by using the information on the first position, the information on the second position, or both, and information on a third position.

In a device including a rotor core 21 , a plurality of magnets 22 disposed on a surface of the rotor core 21 along a thrust generation direction (S direction), and a magnet holding portion 23 disposed between the magnets 22 and 22 , in which the magnet holding portion 23 is structured by including: a protruding portion 23 a extending from the rotor core 21 in a radial direction (T direction), which is the direction orthogonal to the thrust generation direction (S direction), passing between the magnet 22 and the magnet 22 ; and a claw portion 23 b extending from a distal end of the protruding portion 23 a to positions overlapping the magnets 22 , a compression layer 24 whose modulus of elasticity is lower than that of the magnet 22 is provided at a position to be compressed when the magnet holding portion 23 is thermally contracted.

A load port includes: a plate-shaped base member having an opening via which a transfer target object is loaded and unloaded; a door member capable of opening and closing the opening; a link mechanism including a link member having one end rotatably connected to the door member; a guide roller configured to move together with the door member; a guide surface bent to extend from a first direction to a second direction and configured to guide the guide roller; a drive member to which the other end of the link member is rotatably connected; and a driver configured to move the drive member in the second direction.

A multilayer culture vessel includes: an internal space that is divided by a boundary portion into a culture space on one side and a buffer space on the other side in a direction parallel to a bottom plate; at least one intermediate plate extending along the direction parallel to the bottom plate at least in the culture space and configured to divide the culture space into culture layers; wall portions at the boundary portion, the wall portions including one extending from the bottom plate in a direction toward a top plate and one extending from each of the at least one intermediate plate in a direction toward the top plate; communication portions formed at the boundary portion to bring the culture layers into communication with the buffer space; and a liquid supply/drainage port formed in the housing at a location facing the buffer space.

An EFEM is provided with a circulation path including a substrate transfer space formed inside a housing and a return path configured to return gas flowing from one side to the other side of the substrate transfer space, the EFEM including: a partition wall configured to separate the substrate transfer space and the return path; a capture part provided in the return path having a higher pressure than the substrate transfer space in a state in which the gas circulates through the circulation path, and configured to capture particles contained in the gas flowing through the return path; and a connecting pipe configured to guide the gas flowing inside a predetermined device arranged in the substrate transfer space to the return path, wherein the connecting pipe is connected to the return path on an upstream side of the capture part in a gas flow direction.

A load port detects an accommodation state of a plurality of substrates, which are accommodated in a FOUP while being arranged in a thickness direction. The load port includes an emitter, a camera, and a controller. The controller performs, by using information on an amount of change in a plurality of pixel values according to coordinates in the thickness direction, double determination as to whether two or more substrate are accommodated in an accommodation region in an imaging region, the accommodation region being a region for accommodating one of the plurality of substrates.

An EFEM includes a housing including a transfer chamber in which a processing target object is transferred, and a connection module provided between the transfer chamber and a front chamber, wherein the housing includes a rear member having a housing-side opening through which the processing target object is capable of passing, the connection module includes a first frame part arranged around the housing-side opening and pressed by a transfer chamber-side surface of the rear member, a second frame part provided in the front chamber and arranged around a front chamber-side opening, and connected to the first frame part, and a sealing part configured to seal the second frame part and the front chamber, and the sealing part includes a flexible portion capable of expanding and contracting at least in a predetermined direction, and an enclosure portion connected to the flexible portion and configured to enclose the front chamber-side opening.

The load port includes a FOUP configured to accommodate a plurality of substrates in multiple stages, cameras configured to image each of the substrates accommodated in the FOUP and including a low-magnification camera with a wide horizontal angle of view and a high-magnification camera with a narrow horizontal angle of view, and a CPU configured to detect the accommodation state of each of the substrates based on the imaging data acquired from the low-magnification camera and the high-magnification camera, respectively.

A cell culture device includes: a base; a rotary table attached to the base; a container holding member attached to the rotary table and configured to hold a cell culture container; and a drive mechanism configured to rotatably drive the rotary table around a first axis and the container holding member around a second axis, wherein a liquid port to which a liquid tube is connected is arranged on an outer peripheral surface of the cell culture container, wherein a first predetermined portion of the liquid tube is positioned on the container holding member by a first positioning member, wherein a second predetermined portion of the liquid tube is positioned on the rotary table by a second positioning member, and wherein the first positioning member is rotatably attached to the container holding member.

A load port mounting position adjustment mechanism is capable of adjusting a mounting position of a load port on a wall surface of a transfer chamber, and includes: an X-axis adjustment part configured to adjust the position of the load port in a width direction of the wall surface; a Y-axis adjustment part configured to adjust the position of the load port in a thickness direction of the wall surface; and a Z-axis adjustment part configured to adjust the position of the load port in a height direction of the wall surface. A three-axis adjustment mechanism that integrates the X-axis, the Y-axis, and the Z-axis adjustment parts is mounted to the wall surface by using a mounting hole formed in either an upper section or a middle section of the wall surface. This improves the workability of mounting the load port to the wall surface with a high precision.