Patent Theme

Advanced Deposition Chamber Hardware

Design and engineering of specialized components within deposition systems, such as heaters, targets, susceptors, and chamber walls, to achieve precise control over process parameters like temperature, material flux, and plasma characteristics.

4,586 US filings from 995 companies since 2023 · 2023: 1,080 · 2024: 1,394 · 2025: 1,404 · 2026 YTD: 708

Coating & Surface Treatment

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#CompanySince 20232023202420252026 YTDYoY
1Applied Materials, Inc.917233275266143-3.3%
2ASM IP Holding B.V.26253707663+8.6%
3Lam Research Corporation23568517244+41.2%
4TOKYO ELECTRON LIMITED23255646746+4.7%
5Samsung Display Co., Ltd.10816433217-25.6%
6NGK INSULATORS, LTD.10315353320-5.7%
7Taiwan Semiconductor Manufacturing Company, Ltd.10218333813+15.2%
8SAMSUNG ELECTRONICS CO., LTD.867242926+20.8%
9Taiwan Semiconductor Manufacturing Co., Ltd.632320173-15.0%
10SEMES CO., LTD.4997267+271.4%
11MiCo Ceramics Ltd.43316204+25.0%
12Philip Morris Products S.A.36814122-14.3%
13AIXTRON SE341012102-16.7%
14KYOCERA CORPORATION33101355-61.5%
15Beijing E-Town Semiconductor Technology Co., Ltd.3158126+50.0%
16SKY TECH INC.298147·-50.0%
17Mattson Technology, Inc.2856125+100.0%
18TOTO LTD.27241011+150.0%
19BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.269791+28.6%
20ENTEGRIS, INC.26117710.0%
21Picosun Oy2681071-30.0%
22BENEQ OY2451531-80.0%
23WATLOW ELECTRIC MANUFACTURING COMPANY249933-66.7%
24Altria Client Services LLC235108·-20.0%
25RTX Corporation223694+50.0%