Patent Theme
Plasma Process Chamber Engineering
Design and control of plasma processing chambers, including heating, gas delivery, electrode configurations, and magnetic field control for uniform and efficient material processing in semiconductor manufacturing.
7,695 US filings from 1,053 companies since 2023 · 2023: 1,844 · 2024: 2,330 · 2025: 2,369 · 2026 YTD: 1,152
Electron / Ion Tubes & Discharge
Top companies
Ranked by filings in this theme since 2023. 2026 is partial.
| # | Company | Since 2023 | 2023 | 2024 | 2025 | 2026 YTD | YoY |
|---|
| 1 | Applied Materials, Inc. | 1,402 | 356 | 424 | 429 | 193 | +1.2% |
| 2 | TOKYO ELECTRON LIMITED | 1,283 | 284 | 387 | 416 | 196 | +7.5% |
| 3 | Lam Research Corporation | 468 | 133 | 104 | 154 | 77 | +48.1% |
| 4 | SAMSUNG ELECTRONICS CO., LTD. | 365 | 56 | 103 | 121 | 85 | +17.5% |
| 5 | ASM IP Holding B.V. | 232 | 49 | 70 | 62 | 51 | -11.4% |
| 6 | SEMES CO., LTD. | 215 | 54 | 43 | 88 | 30 | +104.7% |
| 7 | HITACHI HIGH-TECH CORPORATION | 161 | 29 | 56 | 58 | 18 | +3.6% |
| 8 | Taiwan Semiconductor Manufacturing Company, Ltd. | 155 | 23 | 51 | 58 | 23 | +13.7% |
| 9 | Kokusai Electric Corporation | 115 | 26 | 25 | 37 | 27 | +48.0% |
| 10 | Advanced Energy Industries, Inc. | 91 | 27 | 28 | 31 | 5 | +10.7% |
| 11 | Taiwan Semiconductor Manufacturing Co., Ltd. | 90 | 34 | 26 | 26 | 4 | 0.0% |
| 12 | Beijing E-Town Semiconductor Technology Co., Ltd. | 86 | 17 | 27 | 34 | 8 | +25.9% |
| 13 | Mattson Technology, Inc. | 81 | 16 | 27 | 32 | 6 | +18.5% |
| 14 | BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. | 78 | 24 | 21 | 29 | 4 | +38.1% |
| 15 | NGK INSULATORS, LTD. | 57 | 14 | 14 | 17 | 12 | +21.4% |
| 16 | PSK Inc. | 38 | 5 | 16 | 11 | 6 | -31.2% |
| 17 | TOTO LTD. | 37 | 7 | 7 | 13 | 10 | +85.7% |
| 18 | Kioxia Corporation | 33 | 7 | 13 | 5 | 8 | -61.5% |
| 19 | MKS Instruments, Inc. | 33 | 14 | 15 | 4 | · | -73.3% |
| 20 | JUSUNG ENGINEERING CO., LTD. | 32 | 9 | 7 | 12 | 4 | +71.4% |
| 21 | Hypertherm, Inc. | 30 | 7 | 11 | 8 | 4 | -27.3% |
| 22 | Panasonic Intellectual Property Management Co., Ltd. | 29 | 7 | 8 | 10 | 4 | +25.0% |
| 23 | ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA | 27 | 6 | 9 | 10 | 2 | +11.1% |
| 24 | ENTEGRIS, INC. | 27 | 9 | 7 | 11 | · | +57.1% |
| 25 | KLA Corporation | 27 | 9 | 10 | 4 | 4 | -60.0% |