KABUSHIKI KAISHA NIHON MICRONICS

A probe includes: a base material with a column shape that includes a first end, a second end, and a cross section with a polygonal shape perpendicular to an axial direction; and a contact film that covers a tip surface of the second end, and remaining side surfaces of the second end obtained by excluding a side surface facing a first direction from a plurality of side surfaces connected to the tip surface of the second end. An end surface of the contact film that covers the tip surface of the second end is a plain surface orthogonal to the axial direction.

An optical probe for transmitting an optical signal to, and receiving an optical signal from, an optical device, includes: a tip surface that is a convex curved surface and faces the optical device; an optical waveguide that is a refractive index distribution type and has a first end part connected to the tip surface; and a base end surface to which a second end part of the optical waveguide is connected.

A probe includes: a tip member that has a support portion; a base material that has sufficient elasticity to be curved and in which a joint region is formed by retracting a portion of a side surface in a thickness direction within a certain range along the axial direction from one end; and a transmission member made of a material having a lower electrical resistance than the base material, which is disposed on a side surface of the base material extending in the axial direction and is connected to the support portion. A first side surface of the support portion and a retracted side surface of the base material abut against each other. A portion of the transmission member extends so as to overlap the joint region, and a portion of the support portion is sandwiched between the extended portion of the transmission member and the base material.

A probe for an electrical connection apparatus includes: a foot portion having an elongated shape extending in a first direction, and having a joint portion that joins to a probe substrate; an arm support portion including a support member extending in a direction intersecting the first direction in the vicinity of one end portion of the foot portion, and a diagonal member that couples from any point on the support member to a point between the other end portion and the center of the foot portion; and a cantilever-structured arm portion having a fixed end and a free end, in which a contact portion that comes into contact with an inspection object is formed at a tip of the free end and the fixed end is coupled to the arm support portion.

An electrical connection device includes: a first substrate having a first surface and a second surface facing in a direction opposite to the first surface; a fixing nut that is disposed in an interior of the first substrate; a second substrate that is laminated on the second surface; and a fixing bolt disposed on the second substrate. A threaded portion of the fixing bolt is inserted into the first substrate from the second surface by passing through at least a portion of the second substrate, and the first substrate is fixed to the second substrate by engaging the threaded portion of the fixing bolt with the fixing nut.

An electrical connection device includes: a printed circuit board; a probe head holding a plurality of probes, each of the probes having a proximal end portion that is electrically connected to the printed circuit board and a distal end portion that comes into contact with an inspection target object; and a fix base provided below the printed circuit board and partially fixed to an upper surface of the probe head. The fix base and the printed circuit board are relatively movable according to thermal expansion.

A probe includes: a foot portion having an elongated shape; a flat plate-shaped support member that is coupled to one end of the foot portion, extends in a first direction, and has a first plate thickness; an arm member that has one end coupled to the support member and extends in a longitudinal direction of the foot portion; a flat plate-shaped tip member that is coupled to the other end of the arm member, extends in the first direction, and has the first plate thickness; and a contact portion that projects from the tip member in the first direction. A projection having a width narrower than the first plate thickness in the first direction is formed on an outer edge portion of the support member and an outer edge portion of the tip member.

An electrical contactor includes a main body unit; a first contact portion which is one tip portion of the main body unit and is in contact with a first contact object; and a second contact portion which is the other tip portion of the main body unit and is in contact with a second contact object, wherein the electrical contactor is made of a conductive ceramic material containing titanium. The electrical contactor may be included in an electrical connecting apparatus having a plurality of electrical contactors, wherein the first contact portion is in contact with an electrode portion of a device under test housed in the housing and the second contact portion is in contact with wiring formed on the substrate.

A probe includes: a tip member including a contact portion and a base end portion connected to the contact portion; a main body in which the base end portion is embedded in an end portion; and a first reinforcing member arranged on a side surface of the main body so as to overlap with at least a part of the base end portion. The base end portion is embedded in the end portion of the main body so as to expose the contact portion. The first reinforcing member is continuously arranged on a side surface of the main body from an embedded region in which the base end portion is embedded to a region around the embedded region.