KABUSHIKI KAISHA NIHON MICRONICS

A tester includes a performance board unit on which a probe card for testing a semiconductor circuit is mounted, and a main body unit to which the performance board unit is detachably attached, in which the performance board unit has a caster on a side closer to the main body unit, and the main body unit has the caster rail supporting the caster and the lifting unit that raises and lowers the caster rail in an attachment/detachment direction of the performance board unit.

An electrical connection device includes: a first substrate having a first surface and a second surface facing in a direction opposite to the first surface; a fixing nut that is disposed in an interior of the first substrate; a second substrate that is laminated on the second surface; and a fixing bolt disposed on the second substrate. A threaded portion of the fixing bolt is inserted into the first substrate from the second surface by passing through at least a portion of the second substrate, and the first substrate is fixed to the second substrate by engaging the threaded portion of the fixing bolt with the fixing nut.

An electrical contactor includes a main body unit; a first contact portion which is one tip portion of the main body unit and is in contact with a first contact object; and a second contact portion which is the other tip portion of the main body unit and is in contact with a second contact object, wherein the electrical contactor is made of a conductive ceramic material containing titanium. The electrical contactor may be included in an electrical connecting apparatus having a plurality of electrical contactors, wherein the first contact portion is in contact with an electrode portion of a device under test housed in the housing and the second contact portion is in contact with wiring formed on the substrate.

A probe includes an arm portion with a contact portion at a tip of a free end protruding in a first direction in a cantilever structure; a support portion connected to the arm portion; a joint portion connected to the support portion; and a tension generating section. The tension generating section includes a first end connected to the support portion, and a second end located closer to the contact portion than the first end in the first direction, and that is separated from the support portion. The tension generating section is elastically deformable so that the position of the second end varies in the first direction.

A manufacturing jig for an electrical connection device includes a jig including a first guide plate and a second guide plate each including a through hole penetrating from a first surface to a second surface, the first guide plate and the second guide plate laminated to be movable relative to each other along the first surface. The through hole includes a common portion extending in a first direction in a plan view, a first guide part extending from the common portion in a second direction different from the first direction, and a second guide part extending from the common portion in a third direction different from the first and second directions. The jig is configured so that probes can be inserted into each of the first guide part and the second guide part, through the first guide plate and the second guide plate successively.

The flatness of a board on which a plurality of probes are mounted is adjusted to improve the electrical contact of the probes with the electrode terminals of a test subject. The electrical connecting apparatus of the present disclosure includes: a wiring board electrically connected to a testing device; a probe board provided on a bottom surface side of the wiring board and having one or more probe attachment parts on which a plurality of probes are mounted for each electrode terminal of a test subject that has one or more electrode terminals, the plurality of probes being electrically contacted with the corresponding electrode terminals; and a cover member that adjusts flatness of the probe board and has at least one or more flatness adjustment mechanisms provided corresponding to each of the probe attachment parts of the probe board.

A large amount of current can be allowed, many short power supply paths and ground paths can be formed, and a wiring resistance can be significantly reduced. An electrical connecting apparatus that electrically connects a testing device and a test subject includes a multilayer wiring substrate having a plurality of contactors that electrically contact electrode terminals of the test subject and electrically connect substrate electrodes connected to the testing device and the electrode terminals, in which the multilayer wiring substrate has a metal core member, and the metal core member is arranged at a position where one or both of a power supply terminal and a ground terminal of the electrode terminals of the test subject are present.

To provide a method of manufacturing an electrical contactor including a volute spring structure extending in upward and downward directions formed integrally using a single material, having mechanical simplicity and excellent functionality, and functioning as an electric circuit achieving connection without loss. The present disclosure is intended for a method of manufacturing an electrical contactor made of a plate-like member having electrical conductivity, comprising: (1) a first step of forming the plate-like member into a barrel shape by winding the plate-like member in a spiral pattern; (2) a second step of compressing the plate-like member formed into the barrel shape from a vertical direction until the plate-like member assumes a volute shape with an upper spiral structure and a lower spiral structure overlapping each other; and (3) a third step of forming a volute-shaped electrical contactor by performing predetermined hardening treatment on the plate-like member temporarily assuming the volute shape as a result of the second step.

[Problem] To provide an electrical connecting apparatus that can realize a stable electrical connecting property by expanding a contact area between an electrode region of a wiring substrate and a connector as compared to the prior art, and suppressing contact resistance. [Solution] An electrical connecting apparatus according to the present disclosure is characterized in including a first electrode region in which a liquid metal is filled in a first recessed part that is capable of conducting with a substrate electrode of a first wiring substrate, a second electrode region in which a liquid metal is filled in a second recessed part that is capable of conducting with a substrate electrode of a second wiring substrate opposing the first wiring substrate, and a connector that causes conduction between the first electrode region and the second electrode region by bringing one end part into contact with the liquid metal of the first electrode region and bringing the other end part into contact with the liquid metal of the second electrode region.

To provide a method of manufacturing an electrical contactor including a volute spring structure extending in upward and downward directions formed integrally using a single material, having mechanical simplicity and excellent functionality, and functioning as an electric circuit achieving connection without loss. The present disclosure is intended for a method of manufacturing an electrical contactor made of a plate-like member having electrical conductivity, comprising: (1) a first step of forming the plate-like member into a barrel shape by winding the plate-like member in a spiral pattern; (2) a second step of compressing the plate-like member formed into the barrel shape from a vertical direction until the plate-like member assumes a volute shape with an upper spiral structure and a lower spiral structure overlapping each other; and (3) a third step of forming a volute-shaped electrical contactor by performing predetermined hardening treatment on the plate-like member temporarily assuming the volute shape as a result of the second step.