RF Plasma Power Delivery

Systems and methods for delivering radio frequency (RF) power to plasma processing chambers, including impedance matching, pulse shaping, and feedback control for stable and efficient plasma generation.

7,807 US filings from 1,445 companies since 2023 · 2023: 2,160 · 2024: 2,346 · 2025: 2,262 · 2026 YTD: 1,039

Electron / Ion Tubes & Discharge

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#	Company	Since 2023	2023	2024	2025	2026 YTD	YoY
1	TOKYO ELECTRON LIMITED	953	231	284	303	135	+6.7%
2	Applied Materials, Inc.	547	154	158	156	79	-1.3%
3	Lam Research Corporation	325	88	75	114	48	+52.0%
4	Skyworks Solutions, Inc.	285	91	80	76	38	-5.0%
5	SAMSUNG ELECTRONICS CO., LTD.	216	43	65	69	39	+6.2%
6	Murata Manufacturing Co., Ltd.	196	47	62	53	34	-14.5%
7	Advanced Energy Industries, Inc.	141	40	44	46	11	+4.5%
8	HITACHI HIGH-TECH CORPORATION	130	23	37	53	17	+43.2%
9	Qorvo US, Inc.	114	37	26	34	17	+30.8%
10	SEMES CO., LTD.	99	34	19	36	10	+89.5%
11	ASM IP Holding B.V.	55	14	12	18	11	+50.0%
12	MKS Instruments, Inc.	49	19	21	9	·	-57.1%
13	Beijing E-Town Semiconductor Technology Co., Ltd.	49	9	15	20	5	+33.3%
14	Mattson Technology, Inc.	48	9	15	20	4	+33.3%
15	QUALCOMM Incorporated	46	13	12	14	7	+16.7%
16	Apple Inc.	44	12	13	13	6	0.0%
17	DH Technologies Development Pte. Ltd.	40	12	11	14	3	+27.3%
18	Thermo Fisher Scientific (Bremen) GmbH	39	4	18	11	6	-38.9%
19	DAIHEN Corporation	37	13	12	6	6	-50.0%
20	Hypertherm, Inc.	36	10	11	11	4	0.0%
21	HAMAMATSU PHOTONICS K.K.	35	10	14	10	1	-28.6%
22	Huawei Technologies Co., Ltd.	35	7	10	10	8	0.0%
23	NXP USA, INC.	35	9	7	8	11	+14.3%
24	TAE Technologies, Inc.	35	11	12	8	4	-33.3%
25	Eagle Harbor Technologies, Inc.	34	13	9	8	4	-11.1%