Patent Theme
Substrate Patterning & Processing
Methods and equipment for applying photoresist uniformly onto wafers, forming patterns through various exposure techniques (e.g., direct imaging, multi-exposure), and integrating patterned layers into semiconductor structures or packaging.
13,156 US filings from 1,244 companies since 2023 · 2023: 3,374 · 2024: 4,167 · 2025: 4,199 · 2026 YTD: 1,416
Photolithography
Top companies
Ranked by filings in this theme since 2023. 2026 is partial.
| # | Company | Since 2023 | 2023 | 2024 | 2025 | 2026 YTD | YoY |
|---|
| 1 | TOKYO ELECTRON LIMITED | 1,302 | 310 | 397 | 466 | 129 | +17.4% |
| 2 | SAMSUNG ELECTRONICS CO., LTD. | 846 | 195 | 256 | 279 | 116 | +9.0% |
| 3 | Taiwan Semiconductor Manufacturing Company, Ltd. | 729 | 183 | 231 | 235 | 80 | +1.7% |
| 4 | ASML Netherlands B.V. | 620 | 194 | 181 | 183 | 62 | +1.1% |
| 5 | Applied Materials, Inc. | 619 | 150 | 218 | 198 | 53 | -9.2% |
| 6 | CANON KABUSHIKI KAISHA | 546 | 165 | 154 | 169 | 58 | +9.7% |
| 7 | Kokusai Electric Corporation | 523 | 120 | 165 | 199 | 39 | +20.6% |
| 8 | SHIN-ETSU CHEMICAL CO., LTD. | 523 | 119 | 131 | 178 | 95 | +35.9% |
| 9 | SEMES CO., LTD. | 482 | 127 | 138 | 160 | 57 | +15.9% |
| 10 | SCREEN Holdings Co., Ltd. | 329 | 56 | 109 | 127 | 37 | +16.5% |
| 11 | Taiwan Semiconductor Manufacturing Co., Ltd. | 323 | 114 | 101 | 83 | 25 | -17.8% |
| 12 | Lam Research Corporation | 250 | 61 | 69 | 97 | 23 | +40.6% |
| 13 | FUJIFILM CORPORATION | 225 | 75 | 71 | 54 | 25 | -23.9% |
| 14 | ASM IP Holding B.V. | 204 | 50 | 66 | 69 | 19 | +4.5% |
| 15 | Kioxia Corporation | 195 | 68 | 67 | 44 | 16 | -34.3% |
| 16 | EBARA CORPORATION | 176 | 47 | 50 | 56 | 23 | +12.0% |
| 17 | Samsung SDI Co., Ltd. | 157 | 21 | 39 | 54 | 43 | +38.5% |
| 18 | JSR CORPORATION | 134 | 33 | 39 | 39 | 23 | 0.0% |
| 19 | NISSAN CHEMICAL CORPORATION | 132 | 25 | 45 | 43 | 19 | -4.4% |
| 20 | TOKYO OHKA KOGYO CO., LTD. | 132 | 27 | 37 | 54 | 14 | +45.9% |
| 21 | NANYA TECHNOLOGY CORPORATION | 126 | 33 | 36 | 41 | 16 | +13.9% |
| 22 | CHANGXIN MEMORY TECHNOLOGIES, INC. | 112 | 40 | 40 | 29 | 3 | -27.5% |
| 23 | ASML Holding N.V. | 78 | 25 | 26 | 21 | 6 | -19.2% |
| 24 | SUMITOMO CHEMICAL COMPANY, LIMITED | 77 | 28 | 25 | 11 | 13 | -56.0% |
| 25 | Inpria Corporation | 71 | 13 | 26 | 24 | 8 | -7.7% |