Patent Theme
Advanced Etching & Patterning Control
Techniques for precise material removal, pattern shaping, and controlling etch selectivity or uniformity, often involving plasma, wet chemistry, or directed beams to achieve desired features on semiconductor substrates.
8,754 US filings from 931 companies since 2023 · 2023: 2,158 · 2024: 2,579 · 2025: 2,789 · 2026 YTD: 1,228
Semiconductor Manufacturing Process
Top companies
Ranked by filings in this theme since 2023. 2026 is partial.
| # | Company | Since 2023 | 2023 | 2024 | 2025 | 2026 YTD | YoY |
|---|
| 1 | TOKYO ELECTRON LIMITED | 1,463 | 319 | 397 | 524 | 223 | +32.0% |
| 2 | Applied Materials, Inc. | 977 | 245 | 290 | 318 | 124 | +9.7% |
| 3 | Lam Research Corporation | 474 | 120 | 122 | 164 | 68 | +34.4% |
| 4 | SAMSUNG ELECTRONICS CO., LTD. | 417 | 84 | 110 | 132 | 91 | +20.0% |
| 5 | Taiwan Semiconductor Manufacturing Company, Ltd. | 391 | 90 | 136 | 128 | 37 | -5.9% |
| 6 | ASML Netherlands B.V. | 295 | 91 | 78 | 94 | 32 | +20.5% |
| 7 | HITACHI HIGH-TECH CORPORATION | 280 | 60 | 90 | 94 | 36 | +4.4% |
| 8 | SEMES CO., LTD. | 252 | 79 | 62 | 68 | 43 | +9.7% |
| 9 | ASM IP Holding B.V. | 218 | 52 | 55 | 69 | 42 | +25.5% |
| 10 | Taiwan Semiconductor Manufacturing Co., Ltd. | 198 | 70 | 66 | 51 | 11 | -22.7% |
| 11 | SHIN-ETSU CHEMICAL CO., LTD. | 196 | 40 | 56 | 64 | 36 | +14.3% |
| 12 | NuFlare Technology, Inc. | 129 | 40 | 30 | 39 | 20 | +30.0% |
| 13 | CANON KABUSHIKI KAISHA | 123 | 36 | 30 | 41 | 16 | +36.7% |
| 14 | Kokusai Electric Corporation | 108 | 15 | 22 | 40 | 31 | +81.8% |
| 15 | FEI Company | 107 | 17 | 32 | 38 | 20 | +18.8% |
| 16 | Advanced Energy Industries, Inc. | 63 | 19 | 20 | 19 | 5 | -5.0% |
| 17 | CHANGXIN MEMORY TECHNOLOGIES, INC. | 62 | 28 | 21 | 12 | 1 | -42.9% |
| 18 | NANYA TECHNOLOGY CORPORATION | 62 | 19 | 16 | 20 | 7 | +25.0% |
| 19 | FUJIFILM CORPORATION | 56 | 14 | 12 | 22 | 8 | +83.3% |
| 20 | Kioxia Corporation | 56 | 17 | 19 | 11 | 9 | -42.1% |
| 21 | TOKYO OHKA KOGYO CO., LTD. | 52 | 8 | 21 | 16 | 7 | -23.8% |
| 22 | Gigaphoton Inc. | 51 | 3 | 19 | 15 | 14 | -21.1% |
| 23 | SCREEN Holdings Co., Ltd. | 50 | 7 | 21 | 13 | 9 | -38.1% |
| 24 | International Business Machines Corporation | 44 | 17 | 10 | 12 | 5 | +20.0% |
| 25 | SPTS Technologies Limited | 41 | 8 | 10 | 14 | 9 | +40.0% |