Patent Theme

Charged Particle Beam Optics

Techniques and devices for generating, shaping, focusing, and deflecting electron or ion beams, often involving multi-pole lenses, deflectors, and aberration correction for applications like microscopy or processing.

4,315 US filings from 964 companies since 2023 · 2023: 1,146 · 2024: 1,356 · 2025: 1,268 · 2026 YTD: 545

Electron / Ion Tubes & Discharge

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#	Company	Since 2023	2023	2024	2025	2026 YTD	YoY
1	ASML Netherlands B.V.	312	95	98	86	33	-12.2%
2	FEI Company	306	67	75	106	58	+41.3%
3	HITACHI HIGH-TECH CORPORATION	287	80	83	92	32	+10.8%
4	NuFlare Technology, Inc.	160	50	40	46	24	+15.0%
5	Applied Materials, Inc.	116	45	21	29	21	+38.1%
6	Carl Zeiss Microscopy GmbH	110	27	33	31	19	-6.1%
7	JEOL Ltd.	88	30	15	33	10	+120.0%
8	CANON KABUSHIKI KAISHA	79	9	21	35	14	+66.7%
9	Carl Zeiss MultiSEM GmbH	77	10	21	32	14	+52.4%
10	HAMAMATSU PHOTONICS K.K.	70	18	28	19	5	-32.1%
11	Thermo Fisher Scientific (Bremen) GmbH	67	8	33	19	7	-42.4%
12	KLA Corporation	59	15	23	13	8	-43.5%
13	DH Technologies Development Pte. Ltd.	57	14	18	17	8	-5.6%
14	SHIMADZU CORPORATION	57	16	22	14	5	-36.4%
15	Thermo Finnigan LLC	47	18	15	11	3	-26.7%
16	ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH	38	8	7	12	11	+71.4%
17	Micromass UK Limited	36	13	13	7	3	-46.2%
18	CARL ZEISS SMT GMBH	35	8	12	9	6	-25.0%
19	Applied Materials Israel Ltd.	35	5	16	9	5	-43.8%
20	SAMSUNG ELECTRONICS CO., LTD.	31	4	13	8	6	-38.5%
21	THE TRUSTEES OF INDIANA UNIVERSITY	27	8	9	9	1	0.0%
22	Axcelis Technologies, Inc.	22	7	4	8	3	+100.0%
23	LEICA MICROSYSTEMS CMS GMBH	21	5	6	7	3	+16.7%
24	Panasonic Intellectual Property Management Co., Ltd.	21	9	5	6	1	+20.0%
25	CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE	20	6	6	4	4	-33.3%