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Ion Implantation Control & Metrology

Methods and apparatus for precise wafer positioning, ion beam uniformity, and dose monitoring during ion implantation processes in semiconductor device manufacturing.

8,594 US filings from 1,815 companies since 2023 · 2023: 2,394 · 2024: 2,514 · 2025: 2,594 · 2026 YTD: 1,092

Electron / Ion Tubes & Discharge

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#CompanySince 20232023202420252026 YTDYoY
1ASML Netherlands B.V.39011911511640+0.9%
2Applied Materials, Inc.347105879956+13.8%
3HITACHI HIGH-TECH CORPORATION3371168210534+28.0%
4SAMSUNG ELECTRONICS CO., LTD.28655859848+15.3%
5FEI Company21653537040+32.1%
6KLA Corporation18855674917-26.9%
7Taiwan Semiconductor Manufacturing Company, Ltd.17742485532+14.6%
8NuFlare Technology, Inc.17458415124+24.4%
9TOKYO ELECTRON LIMITED11430254217+68.0%
10Thermo Fisher Scientific (Bremen) GmbH11218522913-44.2%
11SHIMADZU CORPORATION10828412712-34.1%
12DH Technologies Development Pte. Ltd.10216442814-36.4%
13HAMAMATSU PHOTONICS K.K.983231287-9.7%
14Applied Materials Israel Ltd.8918263114+19.2%
15JEOL Ltd.883812317+158.3%
16Carl Zeiss MultiSEM GmbH8412233415+47.8%
17CANON KABUSHIKI KAISHA7726192111+10.5%
18Axcelis Technologies, Inc.731993510+288.9%
19Micromass UK Limited732726164-38.5%
20Taiwan Semiconductor Manufacturing Co., Ltd.732517247+41.2%
21ROHDE & SCHWARZ GMBH & CO. KG7110202813+40.0%
22Thermo Finnigan LLC702326156-42.3%
23Kioxia Corporation672921116-47.6%
24Carl Zeiss Microscopy GmbH631523196-17.4%
25CARL ZEISS SMT GMBH5813171810+5.9%