Patent Theme
Wafer Handling and Process Environment Control
Systems and methods for automated substrate transport, precise positioning, temperature regulation, and chamber environment management to ensure process stability, uniformity, and yield in semiconductor manufacturing.
12,806 US filings from 1,641 companies since 2023 · 2023: 3,140 · 2024: 3,982 · 2025: 4,295 · 2026 YTD: 1,389
Semiconductor Manufacturing Process
Top companies
Ranked by filings in this theme since 2023. 2026 is partial.
| # | Company | Since 2023 | 2023 | 2024 | 2025 | 2026 YTD | YoY |
|---|
| 1 | Applied Materials, Inc. | 1,532 | 396 | 479 | 499 | 158 | +4.2% |
| 2 | TOKYO ELECTRON LIMITED | 1,287 | 288 | 393 | 459 | 147 | +16.8% |
| 3 | SEMES CO., LTD. | 751 | 190 | 215 | 269 | 77 | +25.1% |
| 4 | SAMSUNG ELECTRONICS CO., LTD. | 747 | 130 | 222 | 271 | 124 | +22.1% |
| 5 | Taiwan Semiconductor Manufacturing Company, Ltd. | 549 | 111 | 198 | 189 | 51 | -4.5% |
| 6 | Lam Research Corporation | 461 | 113 | 118 | 165 | 65 | +39.8% |
| 7 | Kokusai Electric Corporation | 450 | 107 | 132 | 168 | 43 | +27.3% |
| 8 | ASM IP Holding B.V. | 321 | 74 | 106 | 103 | 38 | -2.8% |
| 9 | Taiwan Semiconductor Manufacturing Co., Ltd. | 301 | 96 | 99 | 92 | 14 | -7.1% |
| 10 | SCREEN Holdings Co., Ltd. | 295 | 54 | 95 | 109 | 37 | +14.7% |
| 11 | DISCO CORPORATION | 185 | 58 | 54 | 60 | 13 | +11.1% |
| 12 | NGK INSULATORS, LTD. | 133 | 32 | 34 | 46 | 21 | +35.3% |
| 13 | CHANGXIN MEMORY TECHNOLOGIES, INC. | 123 | 58 | 41 | 22 | 2 | -46.3% |
| 14 | EBARA CORPORATION | 105 | 19 | 45 | 32 | 9 | -28.9% |
| 15 | Kioxia Corporation | 102 | 28 | 43 | 21 | 10 | -51.2% |
| 16 | KLA Corporation | 95 | 27 | 26 | 30 | 12 | +15.4% |
| 17 | HITACHI HIGH-TECH CORPORATION | 87 | 24 | 22 | 31 | 10 | +40.9% |
| 18 | Taiwan Semiconductor Manufacturing Company Limited | 85 | 20 | 24 | 31 | 10 | +29.2% |
| 19 | ASML Netherlands B.V. | 81 | 22 | 21 | 33 | 5 | +57.1% |
| 20 | CANON KABUSHIKI KAISHA | 79 | 20 | 27 | 23 | 9 | -14.8% |
| 21 | BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. | 75 | 18 | 17 | 37 | 3 | +117.6% |
| 22 | GlobalWafers Co., Ltd. | 66 | 19 | 20 | 19 | 8 | -5.0% |
| 23 | Brooks Automation US, LLC | 58 | 24 | 23 | 7 | 4 | -69.6% |
| 24 | SHINKO ELECTRIC INDUSTRIES CO., LTD. | 56 | 17 | 13 | 22 | 4 | +69.2% |
| 25 | DAIFUKU CO., LTD. | 54 | 10 | 23 | 16 | 5 | -30.4% |