Patent Theme
Precision Substrate and Wafer Cleaning
Specialized cleaning techniques and apparatus designed for removing microscopic contaminants, residues, or films from sensitive substrates, such as semiconductor wafers or flat panel displays, often involving chemical, mechanical, or plasma-based methods.
5,124 US filings from 801 companies since 2023 · 2023: 1,289 · 2024: 1,589 · 2025: 1,707 · 2026 YTD: 539
Cleaning Processes
Top companies
Ranked by filings in this theme since 2023. 2026 is partial.
| # | Company | Since 2023 | 2023 | 2024 | 2025 | 2026 YTD | YoY |
|---|
| 1 | TOKYO ELECTRON LIMITED | 452 | 125 | 140 | 142 | 45 | +1.4% |
| 2 | SEMES CO., LTD. | 407 | 103 | 105 | 147 | 52 | +40.0% |
| 3 | Applied Materials, Inc. | 405 | 113 | 139 | 109 | 44 | -21.6% |
| 4 | SCREEN Holdings Co., Ltd. | 310 | 53 | 109 | 107 | 41 | -1.8% |
| 5 | EBARA CORPORATION | 256 | 57 | 101 | 80 | 18 | -20.8% |
| 6 | SAMSUNG ELECTRONICS CO., LTD. | 255 | 46 | 64 | 101 | 44 | +57.8% |
| 7 | Taiwan Semiconductor Manufacturing Company, Ltd. | 226 | 47 | 85 | 68 | 26 | -20.0% |
| 8 | DISCO CORPORATION | 161 | 40 | 43 | 59 | 19 | +37.2% |
| 9 | Taiwan Semiconductor Manufacturing Co., Ltd. | 128 | 42 | 45 | 31 | 10 | -31.1% |
| 10 | Lam Research Corporation | 106 | 32 | 29 | 37 | 8 | +27.6% |
| 11 | HITACHI HIGH-TECH CORPORATION | 63 | 14 | 20 | 26 | 3 | +30.0% |
| 12 | Kokusai Electric Corporation | 62 | 21 | 18 | 18 | 5 | 0.0% |
| 13 | SUMCO Corporation | 55 | 13 | 20 | 15 | 7 | -25.0% |
| 14 | ASM IP Holding B.V. | 55 | 13 | 17 | 19 | 6 | +11.8% |
| 15 | ENTEGRIS, INC. | 41 | 17 | 8 | 11 | 5 | +37.5% |
| 16 | GlobalWafers Co., Ltd. | 36 | 9 | 6 | 16 | 5 | +166.7% |
| 17 | ACM RESEARCH (SHANGHAI), INC. | 36 | 4 | 18 | 12 | 2 | -33.3% |
| 18 | SHIBAURA MECHATRONICS CORPORATION | 35 | 3 | 13 | 16 | 3 | +23.1% |
| 19 | Kioxia Corporation | 34 | 12 | 10 | 6 | 6 | -40.0% |
| 20 | SHINKO ELECTRIC INDUSTRIES CO., LTD. | 34 | 12 | 8 | 13 | 1 | +62.5% |
| 21 | CHANGXIN MEMORY TECHNOLOGIES, INC. | 32 | 16 | 12 | 4 | · | -66.7% |
| 22 | NISSAN CHEMICAL CORPORATION | 31 | 11 | 5 | 8 | 7 | +60.0% |
| 23 | FUJIFILM CORPORATION | 29 | 6 | 9 | 12 | 2 | +33.3% |
| 24 | CANON KABUSHIKI KAISHA | 27 | 6 | 7 | 13 | 1 | +85.7% |
| 25 | ILLINOIS TOOL WORKS INC. | 25 | 4 | 13 | 6 | 2 | -53.8% |