Patent Theme
Post-Processing Cleaning & Conditioning
Methods and apparatus for cleaning polishing pads, dressers, chamber components, or finished substrates to remove residues, debris, or contaminants, often involving specialized nozzles, fluids, or mechanical actions.
5,849 US filings from 1,302 companies since 2023 · 2023: 1,501 · 2024: 1,842 · 2025: 1,850 · 2026 YTD: 656
Grinding & Polishing
Top companies
Ranked by filings in this theme since 2023. 2026 is partial.
| # | Company | Since 2023 | 2023 | 2024 | 2025 | 2026 YTD | YoY |
|---|
| 1 | Applied Materials, Inc. | 489 | 160 | 154 | 133 | 42 | -13.6% |
| 2 | TOKYO ELECTRON LIMITED | 422 | 100 | 147 | 138 | 37 | -6.1% |
| 3 | EBARA CORPORATION | 343 | 76 | 139 | 105 | 23 | -24.5% |
| 4 | SEMES CO., LTD. | 340 | 82 | 90 | 117 | 51 | +30.0% |
| 5 | SAMSUNG ELECTRONICS CO., LTD. | 248 | 49 | 57 | 96 | 46 | +68.4% |
| 6 | DISCO CORPORATION | 207 | 56 | 58 | 72 | 21 | +24.1% |
| 7 | SCREEN Holdings Co., Ltd. | 199 | 29 | 71 | 64 | 35 | -9.9% |
| 8 | Taiwan Semiconductor Manufacturing Company, Ltd. | 164 | 39 | 61 | 45 | 19 | -26.2% |
| 9 | Taiwan Semiconductor Manufacturing Co., Ltd. | 98 | 35 | 35 | 21 | 7 | -40.0% |
| 10 | Lam Research Corporation | 59 | 15 | 18 | 22 | 4 | +22.2% |
| 11 | Kokusai Electric Corporation | 48 | 16 | 11 | 16 | 5 | +45.5% |
| 12 | SUMCO Corporation | 47 | 12 | 15 | 12 | 8 | -20.0% |
| 13 | ILLINOIS TOOL WORKS INC. | 43 | 10 | 20 | 11 | 2 | -45.0% |
| 14 | Ecolab USA Inc. | 42 | 11 | 14 | 14 | 3 | 0.0% |
| 15 | ASM IP Holding B.V. | 36 | 3 | 14 | 14 | 5 | 0.0% |
| 16 | 3M Innovative Properties Company | 34 | 11 | 9 | 12 | 2 | +33.3% |
| 17 | GlobalWafers Co., Ltd. | 32 | 9 | 4 | 15 | 4 | +275.0% |
| 18 | Kioxia Corporation | 32 | 8 | 10 | 6 | 8 | -40.0% |
| 19 | CHANGXIN MEMORY TECHNOLOGIES, INC. | 31 | 12 | 15 | 4 | · | -73.3% |
| 20 | ACM RESEARCH (SHANGHAI), INC. | 30 | 4 | 15 | 9 | 2 | -40.0% |
| 21 | ENTEGRIS, INC. | 29 | 11 | 3 | 9 | 6 | +200.0% |
| 22 | SHIBAURA MECHATRONICS CORPORATION | 28 | 1 | 12 | 12 | 3 | 0.0% |
| 23 | CANON KABUSHIKI KAISHA | 27 | 7 | 5 | 11 | 4 | +120.0% |
| 24 | SK enpulse Co., Ltd. | 26 | 4 | 13 | 9 | · | -30.8% |
| 25 | Samsung Display Co., Ltd. | 25 | 4 | 9 | 7 | 5 | -22.2% |